Old Web
English
Sign In
Acemap
>
Paper
>
Design and Development of ALD Precursors for Microelectronics
Design and Development of ALD Precursors for Microelectronics
2008
Ravi Kanjolia
Jeffrey W. Anthis
Rajesh Odedra
Paul A. Williams
Peter Nicholas Heys
Keywords:
Nanotechnology
Microelectronics
Materials science
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
3
Citations
NaN
KQI
[]