The Influence of Plasma Composition on Mechanical Stresses in Substrate-Coating System

The work calculates the stress-strain state (SSS) of substrate-coating system during plasma deposition of metals (Ti, Al, Cr) and nitrogen. The study demonstrates the influence of the concentration of deposited elements at the surfaces of growing coating on the redistribution of stresses. The paper establishes the dependence of the penetration depth of deposited elements into the substrate on their concentration at the surface of growing coating.