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Electric current conduction in ALD-Al 2 O 3 films with O 3 treatment
Electric current conduction in ALD-Al 2 O 3 films with O 3 treatment
2017
Satoshi Okubo
Daisuke Matsumura
Atsushi Hiraiwa
Hiroshi Kawarada
Keywords:
Condensed matter physics
Electric current
Materials science
Thermal conduction
Correction
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