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EUV-source modeling with account of detailed level kinetics included in-line into gasdynamic calculations
EUV-source modeling with account of detailed level kinetics included in-line into gasdynamic calculations
2012
D A Kim
V. G. Novikov
G V Dolgoleva
K N Koshelev
A. D. Solomyannaya
Keywords:
Computational chemistry
Physical chemistry
Kinetics
Extreme ultraviolet lithography
Chemistry
source modeling
Thermodynamics
Computational physics
Correction
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