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Acemap > Paper > 圧電・超音波材料 多成分PZT系薄膜の作製と圧電特性--GHz high k[t]/high Qm FBAR

圧電・超音波材料 多成分PZT系薄膜の作製と圧電特性--GHz high k[t]/high Qm FBAR

2009 
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