Comparison of Coupling Methods for Linking Between Reactor and Feature Scales

Currently there are two main methods used for coupling macroscopic reactor-scale and microscopic feature-scale models in multi-scale CVD simulation. These methods differ in the plane selected for coupling. With one method, coupling occurs at a source plane offset from the deposition surface, while in the other method coupling occurs on the deposition surface itself. The two methods also have different feature-scale modeling techniques associated with them. A Monte Carlo (MC) technique is used for the source plane-coupling method, while a ballistic transport technique is used for the deposition surface-coupling method. In this study a multi-scale code with a ballistic feature-scale model is modified so that both coupling methods can be applied, allowing for direct comparison of the two coupling methods.