Polycapillary conic collimator for micro-XRF

In this paper a new method of micro-XRF will be presented. A polycapillary conic structure was used for collimation of the fluorescence radiation emitted by the sample. In spite of the usual method for realization of local analysis, in which the primary beam has to be collimated on the sample surface, the polycapillary conic collimator takes the fluorescence radiation from a local area and transports it to the detector. Under these conditions the primary beam may irradiate a large surface area at the sample. Therefore, also X-ray sources of moderate brilliance may be used in such an experimental set-up. A spatial resolution of about 20 micrometers can be achieved.