Performance of 4x5120 Element Visible and 2x2560 Element Shortwave Infrared Multispectral Focal Planes

Performance measurements of two Multispectral Linear Array focal planes are presented. Both pushbroom sensors have been developed for application in remote sensing instruments. A buttable, four-spectral-band, linear-format charge coupled device (CCD) and a but-table, two-spectral-band, linear-format, shortwave infrared charge coupled device (IRCCD) have been developed under NASA funding. These silicon integrated circuits may be butted end to end to provide very-high-resolution multispectral focal planes. The visible CCD is organized as four sensor lines of 1024 pixels each. Each line views the scene in a different spectral window defined by integral optical bandpass filters. A prototype focal plane with five devices, providing 4x5120-pixel resolution has been demonstrated. The high quantum efficiency of the backside-illuminated CCD technology provides excellent signal-to-noise performance and unusually high MTF across the entire visible and near-IR spectrum. The shortwave infrared (SWIR) sensor is organized as two line sensors of 512 detectors each. The SWIR (1-2.5 μm) spectral windows may be defined by bandpass filters placed in close proximity to the devices. The dual-band sensor consists of Schottky barrier detectors read out by CCD multiplexers. This monolithic sensor operates at 125°K with radiometric performance. A prototype five-device focal plane providing 2x2560 detectors has been demonstrated. The devices provide very high uniformity, and excellent MTF across the SWIR band.