Magnetron sputtering enabled nanostructured materials synthesis for electrochemical energy storage

Batteries and supercapacitors are promising candidates for electrochemical energy storage while the development of their electrode materials is becoming a bottleneck. This limitation necessitates the design of high specific capacity/capacitance, excellent cycling stability, yet low-cost electrode materials. Herein, we presented research progress of magnetron sputtering enabled nanostructured materials as electrode materials for electrochemical energy storage. Firstly, magnetron sputtered anode materials (Si-based materials, metal-based materials, metal oxides, etc.) and cathode materials (i.e., transition metal oxides, phosphate) for lithium/sodium ion batteries are systematically reviewed. Secondly, magnetron sputtered electrode materials (metal and metal oxides, metal nitrides, etc.) for electrochemical supercapacitors are discussed. Meantime, critical insights into the corresponding electrical conductivity, cycling stability of electrode materials are provided through illustrations of how to rationally design and optimize electrode materials via magnetron sputtering technology. Finally, the emerging challenges and future directions of magnetron sputtered electrode materials are concluded for electrochemical energy storage.