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Thermoelectric bolometers based on heavily doped ultra-thin silicon membranes
Thermoelectric bolometers based on heavily doped ultra-thin silicon membranes
2017
Aapo Varpula
Andrey Timofeev
Andrey Shchepetov
Kestutis Grigoras
Juha Hassel
Jouni Ahopelto
Markku Ylilammi
Mika Prunnila
Keywords:
Thermoelectric effect
Doping
Bolometer
Optoelectronics
Membrane
Materials science
Silicon
Correction
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