Preparation of piezoelectric Pb(Zr,Ti)O3–Pb(Zn1/3Nb2/3)O3 thick films on ZrO2 substrates using low-temperature firing

Abstract Thick films of Pb(Zr,Ti)O 3 –Pb(Zn 1/3 Nb 2/3 )O 3 (PZT–PZN) with additional PbO-TiO 2 -ZrO 2 -SiO 2 -Bi 2 O 3 glass-ceramics were fabricated using a sequential process of screen-printing, drying, pressing, and firing. PZT–PZN paste containing the glass-ceramics was formed into thick films by firing it at temperatures above 700 °C, where the glass-ceramics enhanced the densification of the films by liquid-phase sintering. Press-treatment of the printed film done before firing also enhanced the densification. Dielectric constant, remnant polarization, and coercive field of the films were investigated as a function of the firing temperature, which ranged from 700 to 950 °C. The best properties were obtained for films fired at 800–850 °C. Piezoelectric actuations were demonstrated using unimorph cantilevers made from the films fired above 700 °C.