Microchannel Heat Sink with Enhanced Heat Transfer Performance by Laser Process

The heat transfer performance of microchannel heat sink which is fabricated by Nanosecond laser machining (NLM) is investigated. The experiment data suggest that the heat transfer performance of microchannel heat sink (MHS) processed by NLM is superior to that by Deep Reactive Ion Etching (DRIE). Under the same testing condition, the temperature difference between them can up to 10 °C. The morphology and micron level particle on the inside surface of channels caused by NLM increase the contact area of coolant and MHS, and through the analysis of simulation results and experiment data, these structures on the inside wall of channel do not disrupt the boundary layer. Hence, there is not large difference of convective heat transfer coefficient between the two kinds of MHS.