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Conductive in situ TEM nanoindentation with a new MEMS sensor
Conductive in situ TEM nanoindentation with a new MEMS sensor
2010
Alexandra Nafari
Johan Angenete
Krister Svensson
Anke Sanz-Velasco
Peter Enoksson
Keywords:
Nanoindentation
Nanotechnology
Materials science
Microelectromechanical systems
In situ
Electrical conductor
mems sensors
Correction
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