Fig. 5.4, (a) Sketch of the SAXS setup. (b) Results of the SAXS measurements. (c) FIB-SEM images of nanogratings inscribed with a pulse energy of 200 nJ: after 500 (upper) and 10 (lower) pulses per spot in the x-z plane, where x is the laser polarization direction, and z the direction of the inscribing laser; from []