Terahertz metamaterials fabrication from narrowband to broadband

Split ring resonator (SRR) structures based terahertz (THz) metamaterials with different gap dimensions are fabricated on polyethylene naphthalate (PEN) films by parallel laser micro-lens array (MLA) lithography and lift-off process. The narrowband resonance is achieved in single layer SRR samples. A series of single layer SRR samples are fabricated with different gap sizes to obtain successive narrowband THz resonances over a wide THz range. For broadband design, these single layer SRR samples are stacked to form a multilayer structure. The multilayer SRR is experimentally demonstrated with a much broader bandwidth of 0.221 THz and enhanced resonance up to 2.14 times as compared to the single layer SRR.