Old Web
English
Sign In
Acemap
>
Paper
>
Poly-silicon based latching RF MEMS switch.
Poly-silicon based latching RF MEMS switch.
2008
Christopher D. Nordquist
Michael S. Baker
David A. Czaplewski
Garth M. Kraus
Gary A. Patrizi
Keywords:
Microelectromechanical systems
Electrical engineering
Silicon
Materials science
Electronic engineering
Microelectronics
silicon based
Nanotechnology
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
1
Citations
NaN
KQI
[]