Coupled vibration of driving sections for an electromechanical integrated harmonic piezodrive system

An electromechanical integrated harmonic piezodrive system was developed that elicits fast responses with nanoscale accuracy and large torque density. The operating principle of the drive system is discussed and its dynamic equations are deduced. Coupled with boundary conditions and continuity conditions, these equations provide the natural frequencies and modal functions. The effects of the principal factors affecting the natural frequencies are investigated. These results provide a basis for improving the rotational accuracy of such systems.