The fabrication method of 3-dimensional substrate with fine structures

PURPOSE: A method for manufacturing a 3D substrate with a micro structure is provided to be applied to various industries by forming a fine pattern on a curved substrate of various 3D shapes. CONSTITUTION: A photosensitive film(2) is coated on a flat substrate(1). A photosensitive pattern(3) is formed by selectively exposing the photosensitive film with an electronic beam. A releasing agent(4) is deposited on the flat substrate with the photosensitive pattern. A liquid polymer(5) is cast on the flat substrate with the releasing agent. The mold of a flat substrate(6_1) formed by curing the liquid polymer is separated from the flat substrate.