THERMODYNAMIC AND KINETIC ASPECTS OF SOLID STATE AMORPHIZATION REACTION IN Ni/a-Si MULTILAYER SYSTEM

The interfacial solid state reaction was studied in the Ni/a-Si multilayer. The thermody-namic and kinetic aspects of the solid state amorphization was explained according to the calculated metastable free energy diagram. A kinetic reaction model for the solid state amorphization reaction of Ni/a-Si multilayers is developed.