Ferroelectric PbZr 0.6 Ti 0.4 O 3 (PZT) thick films were fabricated using a combination of screen-printing method and PZT precursor sol coating process (M. Koch, N. Harris, R. Maas, A. G. R. Evans, N. M. White and A. Brunnschweiler, Meas. Sci. Technol.8 (1997) 49; Y. S. Yoon, J. Korean. Phys. Soc.47 (2005) 321). Structural and electrical properties of the PZT thick films with the treatment of sol coating were investigated. The porosity decreased and the densification was enhanced with increasing the number of sol coatings. All PZT thick films showed the typical X-ray diffraction patterns of a perovskite polycrystalline structure. The thickness of all thick films was approximately 60–61 μm. The relative dielectric constant increased and dielectric loss decreased with increasing the number of sol coatings, and the values of the six-layer PZT-6 film were 167.8, 0.78% at 1 kHz, respectively. The remanent polarization and coercive field of the 6-coated PZT-6 thick films were 14.1 μC/cm 2 and 20.3 kV/cm, respectively.
YBCO thin films on $SiO_2$/Si substrate were fabricated by spin-coaing of an alkoxide-derived precursor and heat treatment. The structural and electrical properties of the YBCO films were investigated as functions of annealing temperature at $600{\sim}800^{\circ}C$. Although YBCO single phase was not synthesized, dense films of YBCO matrix phase and minor second phases have been successfully fabricated at the annealing temperatures of $650{\sim}800^{\circ}C$. Thickness and temperature coefficient of resistance (TCR) of YBCO thin films with annealing temperature of $750^{\circ}C$ were 0.31 ${\mu}m$ and $-2.92%/^{\circ}C$, respectively.
Lead-free 0.98(Na0.5K0.5)NbO3-0.02Ba(Zr0.52Ti0.48)O3 [0.98NKN-0.02BZT] ceramics were fabricated by the conventional mixed oxide method with sintering temperature at 1,080°C to 1,120°C. The results indicate that the sintering temperature obviously influences the structural and electrical properties of the sample. For the 0.98NKN-0.02BZT ceramics sintered at 1,080°C to 1,120°C, the bulk density increased with increasing sintering temperature and showed a maximum value at a sintering temperature of 1,090°C. The dielectric constant, piezoelectric constant [d33], electromechanical coupling coefficient [kp], and remnant polarization [Pr] increased with increasing sintering temperature, which might be related to the increase in the relative density. However, the samples would be deteriorated when they are sintered above the optimum temperature. High piezoelectric properties of d33 = 217 pC/N, kp = 41%, dielectric constant = 1,951, and ferroelectric properties of Pr = 10.3 μC/cm2 were obtained for the 0.98NKN-0.02BZT ceramics sintered at 1,090°C for 4 h.
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