Fengxu Zhang

Blackboard (United States)

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Zhanxiu Cai

Blackboard (United States)

Yue Hao

Xidian University

Yangxi Zhang

Hong Kong Polytechnic University

Chang Gao

Beihang University

Chengwu Gao

Zhengzhou University

W.P. Cui

University of Florida

Hongli Hu

Chinese University of Hong Kong, Shenzhen

Luyang Lyu

Blackboard (United States)

Qingwen Fang

Jiangxi Agricultural University

Jun-Jie Tseng

Blackboard (United States)

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Blackboard (United States)

114

Peking University

Chinese Academy of Sciences

Shanghai Jiao Tong University

University of Chinese Academy of Sciences

National Kaohsiung University of Science and Technology

Sichuan University

National Cheng Kung University

China Medical University Hospital

Virtual Reality Medical Center

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ECEI 2024 Cover Page

Kai‐Sheng Hsieh Tung-Hua Yang Yu-Lung Hsu Kai-Cheng Hsu Pei-Jung Lin

10.1109/ecei60433.2024.10510857

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High temperature pressure sensor using a thermostable electrode

Guoshan Liu W.P. Cui Hongli Hu Fengxu Zhang Yangxi Zhang

High temperature pressure sensors have been widely applied in modern industry. However, the performance of the pressure sensor is largely dependent on the thermal stability of ohmic contact electrode. This paper presents a TiSi ₂ /Ti/TiN/Pt/Au multilayer electrode. Linear transmission line method (TLM) and voltmeter-ammeter method have been used to measure the electronic properties of the electrode at high temperature. The test results show that the multilayer electrode can be used in fabricating high temperature pressure sensor. Moreover, a high temperature piezoresistive pressure sensor is designed using this multilayer electrode. ANSYS software and finite element method (FEM) have been used to analyze the stress distribution, sensitivity and nonlinearity. To verify this design, the pressure sensor is fabricated based on silicon on insulator (SOI) wafer. The pressure sensor is measured across the range of 30-150kPa and the temperature range is 25-500°C. The test results show that the ohmic contact electrode and the pressure sensor are able to work at high temperature.

Ohmic contact

10.1109/nems.2015.7147410

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Silicon on insulator pressure sensor based on a thermostable electrode for high temperature applications

Micro & Nano Letters (2015)

G.D. Liu W.P. Cui Hongli Hu Fengxu Zhang Yangxi Zhang

A high temperature silicon on insulator pressure sensor utilising a Ti/TiN/Pt/Au electrode is presented for improving the thermal stability of ohmic contacts, which can work stably at high temperatures of up to 500°C. To analyse the characteristics of the electrode at high temperatures, a special test structure is measured using the linear transmission line method and Auger electron spectroscopy. To solve the measurement problem, a novel calibration setup is designed to calibrate the absolute pressure sensor at extremely high temperatures. The measurement results have shown that the pressure sensor has a nonlinearity error of 0.17%FS and a sensitivity of 0.24 mV/kPa with a measurement range of 30–150 kPa at 500°C, indicating the good thermal stability of the ohmic contacts.

Ohmic contact

Linearity

Thermal Stability

Pressure measurement

10.1049/mnl.2015.0181

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Design of Smart Electric Fan

Feng Wang Zengkai Shi Yuping Zhang Chang Gao Qingwen Fang

As science and technology keep advancing, the concept of the smart home has been widely publicized. To overcome the limitations of traditional fans such as unitary intelligent functions, few applicable occasions, and unreasonable product design, the comfort and convenience of product use must be improved. Thus, we designed a multifunctional electric fan and innovated the control system by using 52 SCM (single chip microcomputer), a digital temperature sensor, a display unit, a keyboard, etc. By measuring the external temperature by the sensor, the wind power of the electric fan was automatically controlled, and the spraying device was used to reduce temperature and increase humidity when the ambient temperature was high. The fan had advantages nd met people's intelligent demands.

Micro computer

Intelligent sensor

10.1109/ecei60433.2024.10510863

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