While the mainstream wafer production is at 0.065 and 0.045 um with 300 mm diameter wafers with ArF exposure tools systems, an idea to explore production feasibility under groundrules smaller than 0.09 um while maintain the cost advantages in KrF exposure tools systems becomes more and more popular and important to all companies including 300mm/200mm FAB. But the k1 factor for sub 0.09um with current popular KrF exposure tools will be about 0.31, which has the same level of complexity in optical proximity correction compared to 0.045 um at 0.93 NA with 193 nm exposure tools. Several RET (Resolution Enhancement Technology) techniques have been proposed for low k1 case and some good results have been achieved. However, each RET techniques has their own merits and demerits. It is still attractive to find out a solution with current KrF exposure tools, popular illumination settings and cost effective masks. In this paper, we will introduce our study for sub 0.09 um design rule with maximum 0.82NA KrF scanner tools. No special RET techniques are used and acceptable DOF, EL, MEEF, LWR and CD proximity are achieved. A novel photoresist optimization solution is both discussed.
Abstract Concrete cracking caused by strand corrosion reduces bond strength and leads to loss of prestress and changes in transfer length. In this chapter, a model, considering the coupled effects of concrete cracking and bond degradation, is proposed to predict the corrosion-induced prestress loss in prestressed concrete structures at first. Then, an analytical model, considering the coupled effects of the Hoyer effect and corrosion-induced cracking, is proposed to predict the transfer length. The effects of strand corrosion on the effective prestress and transfer length are studied.
Ad-hoc network without centralized infrastructure makes its security problem tricky. In this paper, we proposed a full distributed secret key management scheme to handle it. The main contribution of this paper is that we combined combined-RSA threshold scheme with elliptic curve cryptography (ECC) to construct a full distributed secret key management scheme. There are several advantages in our scheme comparing with traditional distributed secret key management key: First we transfer the secret share generation process from initiator to nodes which belong to this network so that ECC generation process and secret share generation process can be performed in parallel. Second, the establishment of secure communication between nodes is straightforward and efficient. Third the secret share generation process for new node non-interactive, furthermore secret share update process is also non-interactive. At last we also analyzed the strength of security of the scheme to show it can fulfill the security requirements of ad-hoc.
The phenomenon of a water mound can show up in the process of water-exit of the missile [1], and the a water mound will break and splash in a very short time, which will exert an extra force on the missile and therefore will affects the movement of the missile as well as the gesture when the missile comes out the water. Therefore, investigation into the water-exit process of the missile is of great significance to the launch of the underwater missiles. The traditional grid methods always fail to simulate the whole the water-exit process because of the large deformation of the mesh. The paper adopts a meshless method, called Moving Particle Semi-Implicit method (MPS), to study the water-exit process of the missile. Based on verifying it by the dam break simulation, MPS is applied to simulate the water mound during the water-exit process, which is aiming at providing some reference for the relevant theoretical research.
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