Donghui Zheng

Nanjing University of Science and Technology

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Lei Chen

Wuhan University of Technology

Wenhua Zhu

Xi'an Jiaotong University

Lei Chen

Nanjing University of Science and Technology

Chenhui Hu

Nanjing University of Science and Technology

陈C

陈磊 Chen Lei

Guangxi University

Zhiyao Ma

Fujian Agriculture and Forestry University

Zhigang Han

Nanjing University of Science and Technology

Zhe Zhang

Nanjing University of Science and Technology

李L

李金鹏 Li Jinpeng

Jinpeng Li

Peking University

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Nanjing University of Science and Technology

Chinese Academy of Sciences

University of Chinese Academy of Sciences

Zhejiang University

Chongqing University

University of Central Florida

University of Hong Kong

Nanyang Technological University

Tsinghua University

Hong Kong University of Science and Technology

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Absolute tests of three flats for interferometer with 800 mm aperture

Optics Express (2024)

Zhiyao Ma Lei Chen Jun Ma Donghui Zheng Zhe Zhang

In this study, absolute tests of three flats were performed by using an 800 mm Fizeau interferometer. The flats were installed by employing double-wedge rubber, and the deformation of the flats, primarily involving power and spherical aberrations, was analyzed by conducting finite element analysis. The measurement results revealed an astigmatism component that did not follow the rotation. The astigmatism was separated from the measurement result, and the remaining aberration was consistent with the simulation results, confirming that the astigmatism deformation did not originate from the rubber installation. Subsequently, an absolute test of an 800 mm flat was completed, and the results were compared with those of the traditional three-flat absolute test and Zygo interferometer. The directions of the vertical diameter lines were consistent. The peak-to-valley difference in the full-surface shape was less than 4 nm, and the root mean square was less than 1 nm. The surface errors of flats A and C were consistent with the result of replacing the reference flat, B, with the fourth flat, D, to perform an absolute test. The difference between flats A and C was similar to Zygo’s results, thus eliminating the influence of the transmission flat. These results verified the accuracy of the results.

Fizeau interferometer

Astigmatism

Aperture (computer memory)

10.1364/oe.512392

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Citations (4)

液体基准平面的Φ300 mm立式斐索干涉仪系统误差标定

Infrared and Laser Engineering (2022)

马致遥 Ma Zhiyao 陈磊 Chen Lei Donghui Zheng 马海颖 Ma Haiying 李若琨 Li Ruokun

10.3788/irla20210880

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Citations (0)

Measuring Optical Homogeneity of Parallel Plates Based on Simultaneous Phase-shifting by Lateral Displacement of Point Sources

ACTA PHOTONICA SINICA (2018)

Rui Zhang 陈磊 Chen Lei 朱文华 Zhu Wenhua 孟诗 Meng Shi Donghui Zheng

10.3788/gzxb20184701.0112002

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Citations (2)

抑制移相干涉仪中相干噪声的多模光纤扩展光源研究

Acta Optica Sinica (2022)

胡晨辉 Hu Chenhui 陈磊 Chen Lei 黄晨 Huang Chen 马致遥 Ma Zhiyao 钱月 Qian Yue

10.3788/aos202242.1906001

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Citations (2)

Near infrared reflective shearing point diffraction interferometer for dynamic wavefront measurement

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE (2016)

Wenhua Zhu Lei Chen Donghui Zheng

A near infrared reflective shearing point diffraction interferometer (NIRSPDI) is designed for large-aperture dynamic wave-front measurement. The PDI is integrated on the small substrate with properly designed thin film. The wave-front under test is reflected by the front and rear surfaces of the substrate respectively to generate an interferogram with high linear-carrier frequency, which is used to reconstruct the wave-front by means of the Fourier transform algorithm. In this article, the system error and the major parameters of NIRSPDI are discussed. In addition, we give an effective method to adjust NIRSPDI for fast measurement. Experimentally NIRSPDI was calibrated by a standard spherical surface and then it was applied to the dynamic wave-front with a diameter of 400mm. The measured results show the error of whole system which verifies that the proposed NIRSPDI is a powerful tool for large-aperture dynamic wave-front measurement.

Shearing (physics)

Shearing interferometer

Aperture (computer memory)

10.1117/12.2240632

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Underwater image recovery method based on hyperspectral polarization imaging

Optics Communications (2020)

Jiaming Qian Jianxin Li Yübo Wang Jie Liu Jiaxin Wang

Full spectral imaging

Visibility

10.1016/j.optcom.2020.126691

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Citations (17)

Absolute measurement for optical inhomogeneity of parallel plate using phase-shifting interferometry

Optical Engineering (2016)

Donghui Zheng Lei Chen Qinyuan Sun Wenhua Zhu Jinpeng Li

Optical inhomogeneity is an important index to evaluate optical transmission material. We propose an absolute measurement method for optical inhomogeneity of the parallel plate with phase-shifting interferometry (PSI). Compared with the window-flipping method, we introduce another transmission flat and add two cavity measurements between the two transmission flats and the reflective flat with the assistance of a Fizeau interferometer. Simulation and experiment results show that the method can effectively eliminate the disturbances of both surfaces of the parallel plate, the reflective flat, and the system error of the interferometer. It reduces the requirement for surface accuracy of the transmission and reflective flats. It is an absolute measurement method for the optical inhomogeneity of the parallel plate, which can be realized with traditional phase-shifting interferometry.

Fizeau interferometer

Absolute phase

10.1117/1.oe.55.12.124103

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Citations (1)

Simultaneous phase-shifting interferometry: immune to azimuth error of fast-axes in retarder array

Applied Optics (2015)

Donghui Zheng Lei Chen Jinpeng Li Chenfeng Gu Wenhua Zhu

Simultaneous phase-shifting interferometry based on a 2×2 retarder array with random fast-axes (RARF-SPSI) is proposed for real-time wavefront measurements. The retarder array is used as the phase-shift component, where the phase retardances are π/2, π, 3π/2, and 2π and the four fast-axes of the four retarders can be somewhat random. In this paper, the mathematical model of RARF-SPSI is built by using a Stokes vector and a Mueller matrix, the phase demodulation method through solving equations is derived, and the coefficient matrix of the equations that is associated with the azimuth of the fast-axes is calculated by Fourier analysis. Then the corresponding simulation analysis is executed. In the experiment, four simultaneous phase-shifting interferograms are captured and the phase distribution under test is demodulated through the proposed method. Compared with the four-bucket phase-shifting algorithm adopted in traditional simultaneous phase-shifting interferometry, the ripple error is suppressed well. The advantage of the proposed RARF-SPSI is that there is no need to calibrate the fast-axes of the phase-shift component before measuring; in other words, the phase demodulation error caused by the azimuth error of fast-axes is eliminated.

Stokes parameters

10.1364/ao.54.009803

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Citations (10)

A cascade Twyman interferometer with active compensation for systematic errors

Optics and Lasers in Engineering (2025)

Zhe Zhang Donghui Zheng Lei Chen

Systematic error

10.1016/j.optlaseng.2025.108822

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Φ600 mm波长调谐干涉仪的振动误差抑制算法

Acta Optica Sinica (2022)

Donghui Zheng 陈磊 Chen Lei 马致遥 Ma Zhiyao 李金鹏 Li Jinpeng 胡晨辉 Hu Chenhui

10.3788/aos202242.2312005

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Citations (2)