Shui‐Shong Lu

National Taiwan University

Author Statistics

Papers

Citation

H-Index

i-10 index

Research Trends

Author Order

Document Type

Co-Authors

Jia‐Yush Yen

National Taiwan University of Science and Technology

Wen-Jong Chen

National Changhua University of Education

Pei‐Chong Tang

National Yang Ming Chiao Tung University

Han‐Pang Huang

National Taiwan University

Kai-Ying Chen

National Taipei University of Technology

Tsong‐Yau Hwang

National Taipei University of Education

Chih‐Kung Lee

National Taiwan University

Chih-Kung Lee

National Taiwan University

Ying-Chou Cheng

National Taiwan University

Ching‐Liang Dai

National Chung Hsing University

Cooperative Institutions

National Taiwan University

National Chung Hsing University

Industrial Technology Research Institute

National Taiwan University of Science and Technology

National Tsing Hua University

National Taipei University of Technology

National Yang Ming Chiao Tung University

ITRI International

Taiwan Semiconductor Manufacturing Company (Taiwan)

National Applied Research Laboratories

Author Statistics

Papers

Citation

H-Index

i-10 index

Research Field

DESIGN AND PROCESSING OF INTEGRATED MICRO ACCEL-EROMETERS USING STANDARD CMOS PROCESS

Journal of the Chinese Institute of Engineers (1997)

Ching‐Liang Dai Shui‐Shong Lu Pei‐Zen Chang

ABSTRACT A capacitive accelerometer integrated with a switched-capacitor circuitry on the same chip has been implemented by using a 0.8μm DPDM (Double Polysilicon Double Metal) CMOS process. We will explain the working principle of the capacitive accelerometer, and describe the design and the post-processing of the capacitive CMOS accelerometer chip. Metal 1 layer is selected as the sacrificial layer. The sensing capacitor of the capacitive accelerometer is composed of poly 1 layer and metal 2 layer. The post-CMOS processing steps need one mask only, and phosphoric acid is used to etch the sacrificial layer for releasing the suspended structure. A switched-capacitor circuitry is for the use of detecting the output signal of the accelerometer. The performance of this CMOS accelerometer demonstrates a bandwidth of 150Hz and an working range of ±15g with a sensitivity of 120μV/g.

10.1080/02533839.1997.9741805

Cite

Citations (3)

Fuzzy bang‐bang controller for time optimal and minimum chattering servo systems

Journal of the Chinese Institute of Engineers (1994)

Tsong‐Yau Hwang Jia‐Yush Yen Shui‐Shong Lu

Abstract This paper addresses “Optimal Path Estimation Method (OPEM),” a new approach for the implementation of time optimal bang‐bang control. The method is based upon feedback information obtained by estimating the distance between the present state to the switching surface defined by the optimal trajectory. A fuzzy controller is used for implementing the control logic. The OPEM controller is able to eliminate the chattering phenomenon common to most conventional trajectory access and following‐type controllers. It is shown that the system trajectory will eventually enter a finite region around the target point and will stay inside that region. The size of the final region around the target point is also determined in this paper. The advantages of the proposed method over traditional Bang‐Bang control are illustrated by the numerical simulations of a servomotor system. Key words: fuzzy controlleroptimal controlbang‐bang control Notes Correspondence addressee

Bang–bang control

Servomechanism

10.1080/02533839.1994.9677570

Cite

Citations (0)

Design and Performance Evaluation of a Multi-Functional Microscopy

WORLD SCIENTIFIC eBooks (2006)

Wen-Jong Chen Chih‐Kung Lee Shui‐Shong Lu

10.1142/9789812774620_0007

Cite

Citations (0)

Computer Disk File Track Accessing Controller Design based upon Cell-to-Cell Mapping

American Control Conference (1992)

Jia‐Yush Yen Wei-Chia Chao Shui‐Shong Lu

The concept of cell-to-cell mapping is proposed for the track accessing controller design of computer disk file actuators. Conventional design approach uses the classical bang-bang control theory. The result does not include any structural resonance of the actuator, and the constraints are only imposed in an ad hoc fashion. No optimization results can be claimed. By working with the cell-to-cell mapping, the structural resonance can be included without any additional difficulty, and the constraints can also be included in the consideration while still satisfying the optimal control requirement. The results showed that when pure inertia model is assumed, classical bang-bang control configuration for the velocity profile is still obtained. When more complex model is used, the classical bang-bang control does not achieve optimization. A more delicate velocity profile is thus necessary.

10.23919/acc.1992.4792058

Cite

Citations (12)

A vision‐based position control system for a one‐link flexible arm

Journal of the Chinese Institute of Engineers (1995)

Pei‐Chong Tang Hsing‐Chung Wang Shui‐Shong Lu

Abstract A video system is a good tool for measuring the geometric shape of a beam. This contactless measurement system is able to provide digitized displacement data for the entire beam with a single transducer. However, it has rarely been implemented for real‐time operations since the speeds of previous image processing schemes has been too slow. In this paper, a multi‐processor system have been built to control a flexible arm with image feedbacks. Several schemes are proposed to reduce the image processing time and to increase its accuracy. The vibration displacements of the entire beam are measured by the vision system with a sampling rate of 60 Hz. From this data, the vibration states can be calculated indirectly. Using these state feedbacks, some experiments on the control of the tip position of an one‐link flexible arm have been performed.

Position (finance)

10.1080/02533839.1995.9677720

Cite

Citations (5)

A Petri-net and entity-relationship diagram based object-oriented design method for manufacturing systems control

International Journal of Computer Integrated Manufacturing (1997)

Kai-Ying Chen Shui‐Shong Lu

An evolutionary object-oriented OO design method is proposed for the control software design of an automated manufacturing system. This OO approach is based upon three popular modelling tools-IDEF0, entity relationship diagram ERD and Petri-net. First, IDEF0, ERD and Petri-net models for manufacturing systems are constructed. Some transformation rules are found between these models and the OO model. Finally, simulation and control software are coded, based on the OO model. The practical significances of the proposals are the suggestion of using Petri-net, ERD and IDEF0 as the three models employed in the evolutionary OO design method, which can improve the limitations of existing methods applied in manufacturing systems. The OO paradigm can thus be considered as a suitable mechanism for combining ERD and Petri-net to give integration of information and control system design in a manufacturing system.

IDEF0

Flexible manufacturing system

10.1080/095119297131156

Cite

Citations (35)

In-situ monitoring of thickness of quartz membrane during batch chemical etching using a novel micromackined acoustic wave sensor

Chi‐Yuan Lee Tsung‐Tsong Wu Yung-Yu Chen Shih-Yung Pao Wen-Jong Chen

This work presents a novel method based on the surface acoustic wave (SAW) device for monitoring in-situ the thickness of quartz membrane during batch chemical etching. Similar to oscillators and resonators, some SAW devices require the thickness of quartz membranes to be known precisely. Precisely controlling the thickness of a quartz membrane during batch chemical etching is important, because it strongly influences post-processing and frequency control. Furthermore, the proposed micromachined acoustic wave sensor, allows the thickness of a quartz membrane from a few /spl mu/m to hundreds of /spl mu/m to be monitored in-situ. In particular, the proposed method is highly appropriate for monitoring in-situ a few /spl mu/m thick quartz membranes, because the thickness of a quartz membrane is proportional to the phase velocity. In summary, the proposed method for measuring the thickness of quartz membrane in real time, has high accuracy, is simple to set up and can be mass produced. Also described herein are the principles of the method used, the detailed process flows, the measurement set-up and the simulation and experimental results. The theoretical and measured values differ by an error of less than 2 /spl mu/m, so the results agreed with each other closely.

Isotropic etching

10.1109/freq.2003.1275226

Cite

Citations (0)

Effects of fluid inertia and surface tension parameter on the operating characteristics of a cylinder‐plane bearing

Journal of the Chinese Institute of Engineers (1989)

Hsien‐I You Shui‐Shong Lu

Abstract The hydrodynamic characteristics of a cylinder‐plane bearing are investigated by using a modified Reynolds equation. The modified Coyne‐Elrod boundary conditions are used at the rupture boundary. It is found that the pressure in the convergent portion of the bearing, and hence the load capacity, is increased significantly as the Reynolds number is increased. The pressure distribution and the load capacity of the bearing are relatively insensitive to the variation of the surface tension parameter.

Tension (geology)

10.1080/02533839.1989.9677172

Cite

Citations (0)

Surface waves induced by Uniform Flow Over a Bulging Bed

Journal of the Chinese Institute of Engineers (1989)

Jyh‐Cherng Shieh Shui‐Shong Lu

Abstract In this paper, implementation of a simulation system for flexible manufacturing cells (FMC) based on a local area network is outlined. Four sets of IBM‐compatible PC's are used to represent the machines in an FMC, which consists of a CNC milling machine, a CNC lathe, an industrial robot, two pallet stands and a cell controller. One PC is used as the cell controller. Two PC's are used as simulators of the milling machine and the lathe. Real‐time graphic animations of tool paths are produced according to the scheduled part programs. The fourth PC simulates the loading and unloading tasks of the robot. The control softwares for the workstations are obtained from the control goal diagrams, which are derived from the system event graph by decomposition. All events which occurred in the simulation are viewed in graphic images. Upon completion of the simulation, a statistical performance report is produced.

Pallet

Workstation

IBM

IBM PC compatible

10.1080/02533839.1989.9677128

Cite

Citations (0)

Dual mode control of a system with friction

IEEE Transactions on Control Systems Technology (1999)

Shih-Jung Huang Jia‐Yush Yen Shui‐Shong Lu

The stick-slip friction system is known to exhibit very different macro and microscopic behaviors. For large movements, the system exhibits the familiar stick-slip friction characteristics; and for very fine movements, the elastic deformation seems to prevail. While there have been tremendous efforts to understand the stick-slip friction mechanism, most people would agree that the complexity of the friction characteristics prevents the establishment, of a simple mathematical model. Thus, the controller design cannot be solely dependent on a friction model. In the paper, a robust controller is developed so that it achieves ultimate boundedness in both the macro and micro motion regions. As a result, the controller is capable of controlling the system across the macro movement range and achieves precision positioning in the micro motion resolution. Comparisons with existing controllers also show that the proposed controller easily achieves a better performance.

Macro

Dual mode

10.1109/87.761051

Cite

Citations (18)