This paper summarizes the development of EUV resists at Semiconductor Leading Edge Technologies (Selete): the benchmarking results of more than 160 EUV resists from resist manufacturers using the small field exposure tool (SFET) and the selection of the Selete standard resists (SSR) for the SFET. We discuss the current status of EUV resist performance compared to the targets for 32-nm half-pitches (hp) concerning resist sensitivity, ultimate resolution, and line-width-roughness (LWR). In addition we show the screening results of new resin materials.
Particulate matter (PM) in automobile tailpipe exhaust is regulated by PM mass but not particle number (PN) in most parts of the world, including Japan, so the effect of PM mass regulations on the atmospheric PN concentration (PNC) is of interest from the point of view of whether a PNC regulation should be introduced to reduce PNCs. This study examined long-term (2004–2017) monitoring of PNCs and other pollutants at a traffic intersection and other sites in Japan. The decay rate of elemental carbon concentrations at the traffic intersection excellently matched the reductions of PM mass in tailpipe emissions from diesel trucks, indicating that the reduction in atmospheric concentrations directly reflected cleaner vehicle exhausts. Both the reduction of traffic volume and the replacement of older vehicles with newer models that comply with tighter regulations were found to reduce emissions. However, a slower reduction trend was found for exhaust-related PNCs (after excluding photochemically formed aerosols) with particle diameter Dp < 100 nm. The mixed fleet emission factor (EF) on a PN basis (EFPN) (Dp = 10–100 nm) of medium- and heavy-duty diesel trucks during 2005–2016 was estimated to range over 1.1–4.9 × 1014 km−1 veh−1 and 0.5–7.4 × 1014 km−1 veh−1 in winter and summer, respectively, under urban driving conditions (0–50 km h−1). For the EFPN of diesel trucks by regulation year, which was estimated using a combination of traffic data and the positive matrix factorization model applied to environmental data, the EFPN of diesel trucks that meet the 1988–1990 regulation was the highest at 1016 km−1 veh−1 and that of those that meet the latest emission regulation (2009–2010), which requires a diesel oxidation catalyst, a diesel particulate filter (DPF), and a NOx catalyst, was the lowest at 1.4 × 1013 km−1 veh−1. The EFPN of the latest regulation diesel trucks was one order of magnitude lower than that of the mixed fleet EFPN of diesel trucks in 2016. Therefore, when all diesel trucks have been replaced by diesel trucks that meet the latest emission regulation, it is expected that the atmospheric PNC will be reduced by one order of magnitude. However, the EFPN of the latest regulation diesel trucks obtained from environmental data was two orders of magnitude higher than the limit value of the Particulate Measurement Programme regulation for non-volatile particles when comparing at the same emission level of PM mass. Further, since all diesel trucks that meet the latest emission regulation are equipped with a DPF, most of the non-volatile particles should be removed from the exhaust by the DPF. Therefore, the condensable particles and their precursors such as semi-volatile compounds are expected to be the cause of this gap; thus, these control policies are needed to further reduce the vehicle-exhaust-derived PN in the environment.
The high pressure fuel injection is very effective for improving NOx and particulate emission from diesel engine. To understand the mechanism of combustion improvement, the observation of combustion phenomena was performed using high speed laser shadowgraph technique. The results indicate that ignition and flame development process is different from base engine in the case of high pressure fuel injection. It becomes clear that combustion is improved by increasing entrained air into spray, rapid mixing between fuel and air.
For the formation of micro joint not to melt by secondary reflow soldering, we tried to enhance the reactivity of Sn–Ag solder with Au/Ni–20Co plating. It was confirmed that the addition of Co in Ni and existence of Au plating effectively accelerated the reaction and the Sn–Ag solder completely transformed to the intermetallic compounds with a higher melting temperature.Particularly, the addition of Co in Ni changed the interfacial reaction layer from Ni3Sn4 to (Ni,Co)Sn2 with higher diffusivity of Ni which enhanced the formation of the intermetallic phases. This process is expected to replace the packaging technology using high temperature solders.
Eco-driving is attractive to the public, not only users of internal-combustion-engine vehicles (ICEVs) including hybrid electric vehicles (HEVs) but also users of electric vehicles (EVs) have interest in eco-driving. In this context, a quantitative evaluation of eco-driving effect of EVs was conducted using a chassis dynamometer (C/D) with an "eco-driving test mode." This mode comprised four speed patterns selected from fifty-two real-world driving datasets collected during an eco-driving test-ride event. The four patterns had the same travel distance (5.2 km), but showed varying eco-driving achievement levels. Three ICEVs, one HEV and two EVs were tested using a C/D. Good linear relationships were found between the eco-driving achievement level and electric or fuel consumption rate of all vehicles. The reduction of CO2 emissions was also estimated. The CO2-reduction rates of the four conventional (including hybrid) vehicles were 10.9%–12.6%, while those of two types of EVs were 11.7%–18.4%. These results indicate that the eco-driving tips for conventional vehicles are effective to not only ICEVs and HEVs but also EVs. Furthermore, EVs have a higher potential of eco-driving effect than ICEVs and HEVs if EVs could maintain high energy conversion efficiency at low load range. This study is intended to support the importance of the dissemination of tools like the intelligent speed adaptation (ISA) to obey the regulation speed in real time. In the future, also in the development and dissemination of automated driving systems, the viewpoint of achieving the traveling purpose with less kinetic energy would be important.
EVAHEARTR^[○!R] is tin implantable ventricular assist device developed by Sun Medical Technology Research Corp. EVAHEARTR^[○!R] consists of a small, light-weight, and high performance centrifugal blood pump. The unique Cool Seal System ensures exceptional durability and improved hemocompatibility while assisting physiological blood flow. In Japan, EVAHEARTR^[○!R] received the approval for manufacturing and marketing of medical devices in 2010 and its sales began in 2011. Neither the blood pump failure nor the blood pump replacement has been reported as of today.
