Jan Kleinert

MKS Instruments (United States)

Author Statistics

Papers

Citation

H-Index

i-10 index

Research Trends

Author Order

Document Type

Co-Authors

N. P. Bigelow

University of Rochester

C. Haimberger

University of Rochester

Zhibin Lin

Fuzhou University

Hisashi Matsumoto

MKS Instruments (United States)

Patrick Zabawa

University of Oklahoma

Amy Wakim

University of Rochester

Jim Brookhyser

MKS Instruments (United States)

Joel N. Schrauben

MKS Instruments (United States)

M. Tscherneck

University of Rochester

Jonathan Klamkin

University of California, Santa Barbara

Cooperative Institutions

Max Planck Institute for Nuclear Physics

Max Planck Society

Electro Scientific Industries (United States)

University of Rochester

Energetics (United States)

Heidelberg University

University of California, Santa Barbara

MKS Instruments (United States)

Johannes Gutenberg University Mainz

Rochester Institute of Technology

Author Statistics

Papers

Citation

H-Index

i-10 index

Research Field

Ultrafast laser ablation of copper with ~GHz bursts

Jan Kleinert Zhibin Lin Hisashi Matsumoto

The recently reported copper ablation study using ultrafast IR lasers with unusually high burst repetition rates (∼ GHz) that claims "an order of magnitude" efficiency enhancement compared to non-burst processes due to "ablation cooling" warrants further investigation both experimentally and through modeling the process. We experimentally reproduce a subset of these results, compare it to the known best non-burst pulse results, and find that within our experimentally accessible parameter range, there is indeed an up to ∼ 3.5x benefit when punching (i.e. drilling holes) with 864 MHz pulse bursts. However, this efficiency increase does not translate from punching to milling (machining an area), which we find to be less than half as efficient as an optimized non-burst process, while also delivering worse process quality. We conclude that a hydrodynamic picture is needed to understand the discrepancy between punching and milling efficiency for a ∼ GHz burst process.

Laser Ablation

Laser beam machining

10.1117/12.2294041

Cite

Citations (30)

Production of Cold Polar Molecules by Photoassociation

Frontiers in Optics (2005)

N. P. Bigelow C. Haimberger Jan Kleinert M. Tscherneck Michael E. Holmes

Get PDF Email Share Share with Facebook Tweet This Post on reddit Share with LinkedIn Add to CiteULike Add to Mendeley Add to BibSonomy Get Citation Copy Citation Text N. P. Bigelow, C. Haimberger, J. Kleinert, M. Tscherneck, and M. E. Holmes, "Production of Cold Polar Molecules by Photoassociation," in Frontiers in Optics, OSA Technical Digest Series (Optica Publishing Group, 2005), paper LWD4. Export Citation BibTex Endnote (RIS) HTML Plain Text Citation alert Save article

10.1364/ls.2005.lwd4

Cite

Citations (0)

Study of die break strength and heat-affected zone for laser processing of thin silicon wafers

Journal of Laser Applications (2015)

Daragh Finn Zhibin Lin Jan Kleinert Michael Darwin Haibin Zhang

As semiconductor based devices are manufactured on ever thinner silicon substrates, the required associated die break strength has to increase commensurately to maintain pick yields. In this study, the influence of laser processing parameters on the die break strength in laser dicing of silicon oxide-coated silicon wafers and silicon-based memory devices is investigated experimentally using ultraviolet lasers spanning a wide range of pulse width, from 400 fs to 150 ns. It is found that the net fluence, an accumulated pulse energy per surface area, is a meaningful process metric for damage induced by heat-affect zone to compare lasers processes with a large variety of pulse widths, laser scan speed, average powers, and repetition rates. Optimized process conditions for both nanosecond and femtosecond pulse widths are identified for achieving the highest die break strength in the target devices. The dependence of heat-affected zone on pulse width and net fluence during nanosecond laser processing is further demonstrated using multiphysical simulations. Simulations suggest that the thickest heat-affected zone section during laser scribing is typically located at the boundary of the laser incident surface. Simulation results also show that for a given repetition rate the heat-affected zone becomes larger as the net fluence increases due to smaller interpulse separation, consistent with the experimental observation.

Nanosecond

10.2351/1.4916979

Cite

Citations (31)

Gallium arsenide optical phased array photonic integrated circuit

Optics Express (2023)

Michael Nickerson Bowen Song Jim Brookhyser Gregory Erwin Jan Kleinert

A 16-channel optical phased array is fabricated on a gallium arsenide photonic integrated circuit platform with a low-complexity process. Tested with a 1064 nm external laser, the array demonstrates 0.92° beamwidth, 15.3° grating-lobe-free steering range, and 12 dB sidelobe level. Based on a reverse biased p-i-n structure, component phase modulators are 3 mm long with DC power consumption of less than 5 µW and greater than 770 MHz electro-optical bandwidth. Separately fabricated 4-mm-long phase modulators based on the same structure demonstrate single-sided V π ·L modulation efficiency ranging from 0.5 V·cm to 1.22 V·cm when tested at wavelengths from 980 nm to 1360 nm.

10.1364/oe.492556

Cite

Citations (6)

Broadband and Low Residual Amplitude Modulation Phase Modulator Arrays for Optical Beamsteering Applications

Conference on Lasers and Electro-Optics (2022)

Michael Nickerson Bowen Song Lei Wang Paul Verrinder Jim Brookhyser

Low loss phase modulator arrays with 1x16 splitters are demonstrated on a gallium arsenide platform that is suitable for monolithic integration with gain. Measured modulator V π ∙L efficiency is 0.7 V∙cm at 1030 nm.

Electro-optic modulator

Modulation (music)

Electro-absorption modulator

10.1364/cleo_si.2022.ss1d.4

Cite

Citations (0)

Laser-Cooled Ions and Atoms in a Storage Ring

Hyperfine Interactions (2003)

Jan Kleinert S. Hannemann B. Eike U. Eisenbarth M. Grieser

Ultracold atom

10.1023/b:hype.0000004245.37565.68

Cite

Citations (0)

Formation and detection of ultracold ground-state polar molecules

Physical Review A (2004)

C. Haimberger Jan Kleinert M. Bhattacharya N. P. Bigelow

We report on the formation of translationally cold $\mathrm{NaCs}$ molecules starting from a laser-cooled atomic vapor of $\mathrm{Na}$ and $\mathrm{Cs}$ atoms. Colliding atoms are transferred into bound molecular states in a two-step photoactivated process in which the atoms are first photoassociated by trap photons into an excited state molecular complex and then allowed to decay into a bound molecular ground state. Time-of-flight measurements show a translational temperature $T=260\ifmmode\pm\else\textpm\fi{}130\phantom{\rule{0.3em}{0ex}}\ensuremath{\mu}\mathrm{K}$ that reflects the measured temperature of the initial atomic gas.

Chemical polarity

10.1103/physreva.70.021402

Cite

Citations (158)

Trapping cold polar molecules on chips

Nuclear Physics A (2007)

N. P. Bigelow D. Delgado Vigil M. Tscherneck Jan Kleinert C. Haimberger

Chemical polarity

Trap (plumbing)

Realization (probability)

10.1016/j.nuclphysa.2007.03.119

Cite

Citations (0)

Atoms, molecules, and optics on chips

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE (2006)

M. Tscherneck Jan Kleinert C. Haimberger Michael E. Holmes Amy Wakim

We discuss the realization of atomic, molecular and optical physics experiments using microfabricated "chip" structures. We focus in particular on the potential for trapping ultra-cold polar molecules using such chip devices and consider the feasibility of several designs and applications.

Realization (probability)

Atom optics

Integrated Optics

10.1117/12.657151

Cite

Citations (1)

Rapid formation of high aspect ratio through holes in thin glass substrates using an engineered, QCW laser approach

Applied Physics A (2022)

Hisashi Matsumoto Zhibin Lin Joel N. Schrauben Jan Kleinert Rodrigo Gómez Vázquez

Laser drilling

10.1007/s00339-022-05404-4

Cite

Citations (8)