Abstract Einkristalline p‐GaSe‐Elektroden (Schichtstruktur, Bandlücke 2 eV) werden anhand von Strom‐Spannungs‐Kurven, Kapazitätsmessungen sowie der spektralen Abhängigkeit der Photoströme charakterisiert.
A microplate technology based on a Compact Cell Culture Disc (CCCD) is described. This new tool employs a multitude of miniature cell culture chambers set into a planar compact disc suitable for computer-aided microscopic or spectroscopic analysis of single cells or cell clones in large numbers. The aim is to perform automated, accurate and reproducible studies of morphologic and physical-chemical parameters, in rapid succession under physiologically and optically ideal, uniform and reproducible conditions.
The nanoimprint lithography (NIL) process with its key elements molding and thin film pattern transfer refers to the established process chain of resist-based patterning of hard substrates. Typical processes for mass fabrication are either wafer-scale imprint or continuous roll-to-roll processes. In contrast to this, similar process chains were established for polymeric microelements fabricated by injection molding, particularly when surface topographies need to be integrated into monolithic polymer elements. NIL needs to be embedded into the framework of general replication technologies, with sizes ranging from nanoscopic details to macroscopic entities. This contribution presents elements of a generalized replication process chain involving NIL and demonstrates its wide application by presenting nontypical NIL products, such as an injection-molded microcantilever. Additionally, a hybrid approach combining NIL and injection molding in a single tool is presented. Its aim is to introduce a toolbox approach for nanoreplication into NIL-based processing and to facilitate the choice of suitable processes for micro- and nanodevices. By proposing a standardized process flow as described in the NaPANIL library of processes, the use of establish process sequences for new applications is facilitated.
Conventional, semiconductor based electronics has its limitations in harsh environments, e.g. operation at low or high temperatures. micro- or nanomechanical switching elements may be an alternative to be used in logic circuits provided that they can be made small and fast enough for useful data processing. in this investigation we demonstrate an integrated micromechanical switch for electric signals based on conventional silicon microprocessing technology. The design allows a significant downscaling towards high density integration.
Using extreme ultraviolet interference lithography, we demonstrate patterning of different inorganic photoresists, reaching the highest reported photolithography resolution of 7 nm half-pitch.
A crucial parameter for the market penetration of TPV is its electricity production cost. In this work a detailed cost estimate is performed for a Si photocell based TPV system, which was developed for electrically self-powered operation of a domestic heating system. The results are compared to a rough estimate of cost of electricity for a projected GaSb based system. For the calculation of the price of electricity, a lifetime of 20 years, an interest rate of 4.25% per year and maintenance costs of 1% of the investment are presumed. To determine the production cost of TPV systems with a power of 12–20 kW, the costs of the TPV components and 100 EUR kW−1el,peak for assembly and miscellaneous were estimated. Alternatively, the system cost for the GaSb system was derived from the cost of the photocells and from the assumption that they account for 35% of the total system cost. The calculation was done for four different TPV scenarios which include a Si based prototype system with existing technology (ηsys = 1.0%), leading to 3000 EUR kW−1el,peak, an optimized Si based system using conventional, available technology (ηsys = 1.5%), leading to 900 EUR kW−1el,peak, a further improved system with future technology (ηsys = 5%), leading to 340 EUR kW−1el,peak and a GaSb based system (ηsys = 12.3% with recuperator), leading to 1900 EUR kW−1el,peak. Thus, prices of electricity from 6 to 25 EURcents kWh−1el (including gas of about 3.5 EURcents kWh−1) were calculated and compared with those of fuel cells (31 EURcents kWh−1) and gas engines (23 EURcents kWh−1).
