Susan Darma

Karlsruhe Institute of Technology

Author Statistics

Papers

Citation

H-Index

i-10 index

Research Trends

Author Order

Document Type

Co-Authors

Tilo Baumbach

Karlsruhe Institute of Technology

B. Krause

Karlsruhe Institute of Technology

S. Ulrich

Karlsruhe Institute of Technology

Marthe Kaufholz

Karlsruhe Institute of Technology

Stefan Mangold

Karlsruhe Institute of Technology

Stephen Doyle

Karlsruhe Institute of Technology

M. Mantilla

Max Planck Society

Michael Stueber

Karlsruhe Institute of Technology

Steffen Rembold

Fischer (Germany)

Michael Stüber

Karlsruhe Institute of Technology

Cooperative Institutions

Karlsruhe Institute of Technology

FIZ Karlsruhe – Leibniz Institute for Information Infrastructure

FZI Research Center for Information Technology

Deutsches Elektronen-Synchrotron DESY

Paul Scherrer Institute

TU Wien

Trinity College Dublin

Applied Materials (Germany)

European Synchrotron Radiation Facility

Max Planck Society

Author Statistics

Papers

Citation

H-Index

i-10 index

Research Field

Composition-dependent structure of polycrystalline magnetron-sputtered V–Al–C–N hard coatings studied by XRD, XPS, XANES and EXAFS

Journal of Applied Crystallography (2013)

B. Krause Susan Darma Marthe Kaufholz Stefan Mangold Stephen Doyle

V-Al-C-N hard coatings with high carbon content were deposited by reactive radio-frequency magnetron sputtering using an experimental combinatorial approach, deposition from a segmented sputter target. The composition-dependent coexisting phases within the coating were analysed using the complementary methods of X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), X-ray absorption near-edge spectroscopy (XANES) and extended X-ray absorption fine-structure spectroscopy (EXAFS). For the analysis of the X-ray absorption near-edge spectra, a new approach for evaluation of the pre-edge peak was developed, taking into account the self-absorption effects in thin films. Within the studied composition range, a mixed face-centred cubic (V,Al)(C,N) phase coexisting with a C-C-containing phase was observed. No indication of hexagonal (V,Al)(N,C) was found. The example of V-Al-C-N demonstrates how important a combination of complementary methods is for the detection of coexisting phases in complex multi-element coatings.

XANES

10.1107/s0021889813014477

Cite

Citations (11)

Modular deposition chamber forin situX-ray experiments during RF and DC magnetron sputtering

Journal of Synchrotron Radiation (2012)

B. Krause Susan Darma Marthe Kaufholz Hans-Hellmuth Gräfe S. Ulrich

A new sputtering system for in situ X-ray experiments during DC and RF magnetron sputtering is described. The outstanding features of the system are the modular design of the vacuum chamber, the adjustable deposition angle, the option for plasma diagnostics, and the UHV sample transfer in order to access complementary surface analysis methods. First in situ diffraction and reflectivity measurements during RF and DC deposition of vanadium carbide demonstrate the performance of the set-up.

Deposition

Vacuum chamber

Cavity magnetron

Vanadium carbide

Ultra-high vacuum

10.1107/s0909049511052320

Cite

Citations (25)

Influence of the deposition geometry on the microstructure of sputter-deposited V-Al-C-N coatings

Susan Darma B. Krause Stephen Doyle Stefan Mangold Tilo Baumbach

Deposition

Cite

Citations (0)