Konrad Herrmann

Grimm Aerosol Technik (Germany)

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Ute Trinkkeller

Leipzig/Halle Airport

Frank Pohlenz

Physikalisch-Technische Bundesanstalt

Febo Menelao

Physikalisch-Technische Bundesanstalt

ΚH

Κ. Hasche

Physikalisch-Technische Bundesanstalt

R. Seemann

Physikalisch-Technische Bundesanstalt

M.J. Klopfstein

Oklahoma State University

Sai Gao

Hebei University of Science and Technology

N.M. Jennett

Université d'Orléans

D.A. Lucca

Oklahoma State University

Z. Li

Physikalisch-Technische Bundesanstalt

Cooperative Institutions

Physikalisch-Technische Bundesanstalt

Chemnitz University of Technology

Institute for Quality and Efficiency in Health Care

Tsinghua University

National Physical Laboratory

Institute of Materials, Minerals and Mining

Technische Universität Berlin

Federal Institute For Materials Research and Testing

Humboldt-Universität zu Berlin

Centre National de la Recherche Scientifique

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Determination of Hardness and Modulus of Thin Films and Coatings by Nanoindentation (INDCOAT): Final Report

N.M. Jennett L. Carney K.L. Lawrence A. Hunt A S Maxwell

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Citations (1)

Lateral comb-drive MEMS structure for micro-measuring probe application

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE (2011)

Fengming Sun Sai Gao Xing Fu Uwe Brand Konrad Herrmann

Electrostatic comb-drive actuators, which consists of two interdigitated finger structures with one fixed and the other connected to a compliant suspension, are the most widely used micro actuators in micro-electro-mechanical systems(MEMS). In the actuator applications, applying a voltage between the interdigitated fingers will generate a relative displacement between the fixed and the movable comb structures. The capacitance of the comb-drive structures will vary according to the variation of the relative displacement. The relationship between displacement and resulting capacitance variation is linear. With this principle, the comb-drive structure is employed as a micro measuring probe in this paper. A main shaft connected with the movable comb structures protrudes out of the MEMS chip to sense the surface topography of a specimen under test. A ruby sphere which is mounted onto the end of the actuator's main shaft is employed as a tip. The displacement of the shaft will vary with the variation of the surface topography of the specimen. Accordingly, the capacitance of the comb-drive structures will change. A capacitance readout circuit is designed to convert the capacitance variation into a voltage variation. The results of the designed electronics will be presented. And a drive and sensing system which consists of the micro measuring probe, the capacitance readout circuit, and computer controlled piezoelectric stages is constructed to measure the surface topography of the specimen. To calibrate the drive and sensing system, a standard step of 68nm is one-line scanned.

Comb drive

10.1117/12.900706

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Härteprüfung an Metallen und Kunststoffen

Konrad Herrmann

Das Buch bietet einen Uberblick uber alle wesentlichen in Industrie und Forschung eingesetzten Harteprufverfahren. Groser Wert wird gelegt auf theoretische Fundierung, vielfaltige praktische Einsatzfalle und die Behandlung von grundlegenden Aspekten, wie Qualitatssicherung, Akkreditierung von Kalibrierlaboratorien, Bestimmung der Messunsicherheit und Umwertung von Harteskalen. Ausgehend von Grundlagen und historischen Wurzeln, wird die Harteprufung von Metallen, Kunststoffen und Gummi behandelt. Neue Entwicklungen, wie die instrumentierte Eindringprufung, werden ausfuhrlich dargestellt. Das Buch liefert ubersichtliche Informationen uber die Normung auf dem Gebiet der Harteprufung. Inhalt: – Grundlagen der Harteprufung – Harteprufung von Metallen – Harteprufung von Kunststoffen und Elastomeren – Instrumentierte Eindringprufung – Normung

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A laser measurement system for the high-precision calibration of displacement transducers

Measurement Science and Technology (1996)

Uwe Brand Konrad Herrmann

A laser system for displacement measurements, based on the iodine-stabilized He - Ne laser wavelength standard at 633 nm, has been built up. Two resonator mirror moving systems with displacement ranges of 3 and respectively were investigated and the guidance deviations of the latter were corrected. An inductive displacement transducer was calibrated using the measuring laser. The overall measurement uncertainty was estimated for the calibration of the inductive transducer for a displacement length of .

Accuracy and precision

10.1088/0957-0233/7/6/009

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Citations (26)

Investigation of the properties of candidate reference materials suited for the calibration of nanoindentation instruments

Zeitschrift für Metallkunde (2003)

Konrad Herrmann N.M. Jennett S. Kuypers I. McEntegaart C. Ingelbrecht

In order to guarantee the accuracy of nanoindentation instruments it is necessary to carry out a series of rather time-consuming and costly direct calibrations. Reference materials with known mechanical properties can be used alternatively for most of these calibrations. Compared with the direct calibration methods, reference materials excel by their lower costs and easy operation. Of high importance is the determination of the indenter tip geometry and the instrument's compliance with suitable reference materials. Within the framework of the European Union (EU) a project Certified Reference Materials for Depth Sensing Instruments was started for the development of certified reference materials with traceability to metrological standards that can be used for the calibration of indentation instruments. As result of a review of candidate materials, a rather broad spectrum of material classes was considered for the investigation of their mechanical properties. The selected candidate materials represent wide ranges of elasticity and hardness. The investigations concentrate on indentation tests. In a first step, the investigations are directed at the determination of the homogeneity of hardness and indentation modulus as well as the propensity to cracking, definition of working load range, the influence of surface roughness, and the effects of different indenter geometry.

Indentation

Certified reference materials

10.3139/146.030802

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Citations (13)

Erkrankungen durch Viren

Springer eBooks (2020)

Konrad Herrmann Ute Trinkkeller

10.1007/978-3-662-60990-3_21

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Citations (1)

Pflege der Haut im Alterungsprozess

Springer eBooks (2020)

Konrad Herrmann Ute Trinkkeller

10.1007/978-3-662-60990-3_30

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Citations (1)

Erythematosquamöse Dermatosen

Springer eBooks (2020)

Konrad Herrmann Ute Trinkkeller

10.1007/978-3-662-60990-3_24

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Lateral scanning confocal microscopy for the determination of in-plane displacements of microelectromechanical systems devices

Optics Letters (2007)

Zhi Li Konrad Herrmann Frank Pohlenz

A method named lateral scanning confocal microscopy (LtSCM) is proposed with the aim of determining the in-plane displacement of microstructures, especially of those moving components within microelectromechanical systems (MEMS) actuators and sensors, which feature high aspect ratio and limited geometrical size in one or two dimensions within the surface plane. The principle of the LtSCM is presented and theoretically analyzed, which indicates that the LtSCM has the potential to determine with high resolution the in-plane displacement, position, and even the geometrical size of the object. Furthermore, in the case of in-plane displacement measurement, the measurement resolution of the LtSCM should be insensitive to the dynamic performance of the movable microstructures, i.e., from quasi-static to ultrahigh speed. In a proof-of-principle experiment, the voltage-displacement response of an electrostatic comb-drive actuator has been obtained with nanometric resolution.

Comb drive

Scanning Probe Microscopy

10.1364/ol.32.001743

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Citations (17)

Ion implantation effects in single crystal Si investigated by Raman spectroscopy

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms (2009)

T.A. Harriman D.A. Lucca J.-K. Lee M.J. Klopfstein Konrad Herrmann

Crystal (programming language)

10.1016/j.nimb.2009.01.021

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Citations (17)