Accurate knowledge of mechanical and thermal properties of structural materials used in MEMS is essential for optimum geometric and functional design. The extraction of precise physical properties is rather complicated due to the size effects, the complexity of the structures and the variations of formation processes. This work is intended to determine the thermal properties of silicon-nitride and diamond layers applied in thermal sensor structures by analyzing thermal responses of a multilayer micro-heater structure.

Diamond cubic

10.1109/therminic.2007.4451774

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Citations (2)

Electrical characterisation of Al/n–Si/p–Si Schottky junctions prepared by plasma immersion implantation

Solid-State Electronics (1998)

Zs. J. Horváth M. Ádám Csaba Dücső István Pintér Vo Van Tuyen

Plasma-immersion ion implantation

10.1016/s0038-1101(97)00235-9

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Citations (23)

Effect of Hexagonal WO3 Morphology on NH3 Sensing

Procedia Engineering (2014)

Máté Takács Csaba Dücső Z. Lábadi Andrea Edit Pap

Tungsten oxide nano-powders were prepared by acidic precipitation from sodium tungstate solution. The alternative processes of the applied hydrothermal method resulted in different structure and morphology of hexagonal WO3nano-crystals. Micro-hotplates with gold electrodes on top to measure sensing layer conductivity were fabricated. WO3 layers of the two morphologies were deposited using capillary dropping technique. Sensor responses were measured up to 220 °C operation temperature for NH3 diluted in synthetic air in the 10-100 ppm range. Test results are compared in terms of conductivity, sensitivity and response time.

Morphology

Tungsten Oxide

Tungstate

Sodium tungstate

10.1016/j.proeng.2014.11.331

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Citations (15)

Anomalous temperature dependence of series resistance in Ag\Si and Al\Si Schottky junctions

Vacuum (1998)

Zs. J. Horváth M. Ádám István Pintér B. Cvikl Dean Korošak

Ohmic contact

Equivalent series resistance

10.1016/s0042-207x(98)00076-1

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Citations (14)

3D force sensors for laparoscopic surgery tool

J Radó Csaba Dücső G. Battistig Gábor Szebényi Gábor Szebényi

3D force sensors were developed to further integration in laparoscopic heads of surgery robots. The Si sensors operate with piezoresistive transduction principle by measuring the stress induced signals of the symmetrically arranged four piezoresistors in a deforming membrane. As the chip size has to be reduced to a few mm2, the conventional anisotropic alkaline etching technique was replaced by deep reactive ion etching (DRIE) for membrane formation. Moreover, DRIE enables to form any geometry of the membrane and offers the formation of monolith force transfer rod protruding over the chip surface. This rod increases shear sensitivity of the structure, thereby plays crucial role in tactile sensing. The technology applies SOI (silicon on insulator) wafers of appropriate device layer thickness, which provide highly uniform membranes and reproducibility of the process. According to the medical and functional requirements the sensors must be covered by biocompatible and sterilisable elastic polymers. As the elastomer drastically effect on the performance of the device, the proposed sensor structures were modelled by coupled finite element simulation to determine the appropriate geometric parameters meet the functional requirements. Sensors were covered with spherically shaped PDMS (polydimethylsiloxane) polymer and the effect of the elastic coating was also studied in terms of sensitivity and response time. Finally, the design of the laparoscopic head with the integrated 3D MEMS force sensors is also demonstrated.

Deep reactive-ion etching

Polydimethylsiloxane

Piezoresistive effect

10.1109/dtip.2016.7514829

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Citations (10)