Aurélien Bellamy

Université d'Orléans

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Olivier Wendling

Université d'Orléans

Thierry Sauvage

Conditions Extrêmes et Matériaux Haute Température et Irradiation

Clément Bessouet

Université Paris-Saclay

Sylvain Lemettre

Université Paris-Saclay

Joanny Moulin

Aix-Marseille Université

Alain Bosseboeuf

Centre de Nanosciences et de Nanotechnologies

Charlotte Kutyla

Conditions Extrêmes et Matériaux Haute Température et Irradiation

C. Guichet

Institut des Matériaux, de Microélectronique et des Nanosciences de Provence

S. Escoubas

Aix-Marseille Université

ΟT

Ο. Thomas

Aix-Marseille Université

Cooperative Institutions

Centre National de la Recherche Scientifique

102

Commissariat à l'Énergie Atomique et aux Énergies Alternatives

Université Paris-Saclay

Conditions Extrêmes et Matériaux Haute Température et Irradiation

Université Claude Bernard Lyon 1

Université d'Orléans

CEA Paris-Saclay

Centre des Matériaux

Université Grenoble Alpes

Institut National Polytechnique de Toulouse

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TaOxNy/Si1-xCx:H/W solar selective absorber materials ageing studied by in situ ion beam analysis.

B. Diallo A. Diop Florian Chabanais Aurélien Bellamy Olivier Wendling

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Contribution of ion beam analysis in multilayer Si1-xCx:H/W solar selective absorber materials characterization

Babacar Diallo A. Diop Danielle Ngoue Aurélien Bellamy Olivier Wendling

Characterization

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Oxygen and hydrogen sorption in thermally activated yttrium-based getter thin films for MEMS vacuum packaging

Charlotte Kutyla Sylvain Lemettre Clément Bessouet Alain Bosseboeuf Philippe Coste

Many microsensors need to operate in medium vacuum, which is obtained by low temperature vacuum packaging integrating a getter film. By a thermal activation during the sealing process, the getter film aims to compensate the outgassing of the inner surfaces of the micro-cavity and also leaks after sealing. Thin films of getter alloys were coevaporated under ultra-high vacuum on silicon wafers. They were activated by annealing at temperatures ranging from 225°C to 400°C, during one hour under Argon atmosphere with traces of oxidizing species. Three complementary ion beam analysis techniques were performed to obtain depth profiles and to quantify the number of atoms of the different gaseous species absorbed by the getter films: Rutherford Backscattering Spectrometry (RBS), Nuclear Reaction Analysis (NRA) and Elastic Recoil Detection Analysis (ERDA). The results show that both oxygen and hydrogen diffuse inside the getter films. However, hydrogen tends to accumulate near the interface between film and substrate and starts to diffuse inside substrate as well. We demonstrated that the sorption of hydrogen by an yttrium-based getter film is tailored by its composition and depends on its degree of oxidation.

Getter

Elastic recoil detection

Outgassing

Rutherford backscattering spectrometry

Nuclear reaction analysis

Ultra-high vacuum

10.1109/dtip56576.2022.9911710

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Smoky Wood-Fired Ancient Glass Furnaces: Carbon Analysis of Roman Glass by 2.0 MeV Deuteron Activation Technique

Minerals (2023)

Chaturvedula S. Sastri Thierry Sauvage Olivier Wendling Aurélien Bellamy Christian Humburg

To understand the wood-fuel contamination problems faced by the ancient glass industry, some Roman glass fragments and beads were analysed for carbon by the elegant, non-destructive deuteron activation technique based on C-12(d,n)N-13 nuclear reaction. Carbon was found in all analysed glasses, covering a mass concentration range from 160 ppm to 2.2%, indicating that some fuel contamination was present in all samples. The higher concentration of 0.94 to 2.2% observed in some beads indicates that carbon was added intentionally as a “component” to the glass melt to obtain an amber colour.

Carbon fibers

10.3390/min13081001

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Electrical and ion beam analyses of yttrium and yttrium-titanium getter thin films oxidation

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena (2021)

Clément Bessouet Sylvain Lemettre Charlotte Kutyla Alain Bosseboeuf Philippe Coste

Yttrium, titanium, and yttrium-titanium getter thin films were elaborated on silicon by coevaporation in ultrahigh vacuum. Y-Ti films exhibit nanometric crystallites size (18–35 nm) leading to a very high grain boundary density, which is a favorable microstructure for activation at low temperature. The yttrium content in Y-Ti alloys influences grain size, resistance against room temperature oxidation, and gettering performance for oxygen. Y-Ti films with an yttrium content higher than 30% show strong oxygen sorption during annealing at low temperature (<300 °C). After 1 h of annealing at 250 °C, it was estimated that the yttrium-based getter films can trap between 0.2 and 0.5 μmol of oxygen per cm2, while no oxygen sorption was detected for a single metal titanium film. This makes Y-Ti getter alloys attractive candidates for the packaging of MEMS under vacuum with a low bonding temperature.

Getter

10.1116/6.0001084

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Citations (4)

Comparative Study on Short Time Oxidation of Un-Irradiated and Protons Pre-Irradiated 316L Stainless Steel in Simulated PWR Water

The minerals, metals & materials series (2017)

M. Boisson L. Legras F. Carrette Olivier Wendling Thierry Sauvage

Pressurized water reactor

10.1007/978-3-319-68454-3_66

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Hydrogen sorption in yttrium-based getter thin films

Vacuum (2022)

Charlotte Kutyla Clément Bessouet Sylvain Lemettre Laëtitia Leroy Alain Bosseboeuf

Elastic recoil detection

Getter

Rutherford backscattering spectrometry

Nuclear reaction analysis

Ion beam analysis

Inert gas

10.1016/j.vacuum.2022.111655

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In situ Ion Beam Analysis for solid/gas interface study: getter materials activation and sorption properties

Thierry Sauvage Charlotte Kutyla Clément Bessouet Charaf-Eddine Bejjit Aurélien Bellamy

Getter

Ion beam analysis

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Zr-V getter films for MEMS packaging

Sylvain Lemettre Clément Bessouet Charlotte Kutyla Alain Bosseboeuf Philippe Coste

Films of Zr and Zr-V were evaporated on silicon substrates and their gettering properties were evaluated for MEMS packaging. Their microstructure was determined by SEM and TEM. The films were then activated at different temperatures at low pressure of oxidizing species under argon atmosphere. The oxygen sorption was measured after annealing by ion-beam analyses. Finally, integrations of getter films with various compositions were realized inside hermetic MEMS packages sealed at 300 °C. All the results showed an optimal performance for the alloy with composition Zr 85 V 15 having a nanocrystallized structure. This work emphasizes the role of grain boundaries in the activation performance of getter films, showing that increasing the density of grain boundary enhances the getter performance until a point where an excess of grain boundaries like in a quasi-amorphous film becomes detrimental to the getter effect.

Getter

10.1109/dtip58682.2023.10267930

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Activation of getter films for MEMS packaging studied by in situ NRA

HAL (Le Centre pour la Communication Scientifique Directe) (2022)

Clément Bessouet Charaf-Eddine Bejjit Charlotte Kutyla Sylvain Lemettre Alain Bosseboeuf

Getter

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