We recently reported a new method for depositing lead zirconate titanate (PZT) thin films via thermal ink jet (TIJ) printing of a modified sol-gel [1].The use of PZT in MEMS has been limited due to the lack of process compatibility with existing MEMS manufacturing processes.Direct printing of PZT thin films eliminates the need for photolithographic patterning and etching, allows for controlled deposition over non-planar topographies, and enables the fabrication of devices with varying thickness which cannot be accomplished with conventional spin coating processes.This paper reports conditions of deposition and crystallization for PZT thin films via thermal ink jet printing.Included are details of the solution chemistry developed, printing conditions required for MEMS quality films, and thermal processing parameters that enable a strong piezoelectric response.
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