We have developed a method of resist patterning using a knife edge probe for fabrication of narrow gap comb-drive actuators. According to a theoretical formulation of a comb-drive actuator, the gap between both opposing comb electrodes strongly affects its electrical property, especially Q-factor. An equivalent circuit of the comb-drive actuator was also conducted to evaluate effects of the gap. The patterning was done by AFM in which a photo resist layer was carved by a knife edge probe. The fabricated pattern was then transformed to an aluminum layer which was used for a mask of Si ethicng. Using this method we have obtained very small trench structure having 460nm in width and established aspect ratio of more than 50.
Detection of self-position is one of the most fundamental functions for mobile robots. In this paper, we propose a position detection system based on visual information. The proposed system is equipped with two cameras to recognize external environment three-dimensionally, and detects self-position based on the information from these cameras. Then we perform experiments of position detection, and evaluate the performance of the proposed system.
Abstract Currently, the DFO chelator is commonly used to conjugate monoclonal antibodies (mAbs) and 89 Zr, whereas the DOTA chelator is commonly used to conjugate mAbs and alpha- and beta-emitting metal radionuclides. However, if the degradation of [ 89 Zr]Zr-DFO-mAb is not negligible, the in vivo biodistribution of 89 Zr might not reflect that of metal radionuclides conjugated with DOTA-mAb. We hypothesized that [ 89 Zr]Zr-DOTA-mAb as a new imaging counterpart would accurately predict the biodistribution of therapeutic metal radionuclides delivered by DOTA-mAb. In this study, we prepared [ 89 Zr]Zr-DOTA-trastuzumab for the first time by a two-step reaction using click chemistry and then investigated the differences in biodistribution profiles between two chelating approaches for 89 Zr. Methods We prepared [ 89 Zr]Zr-DOTA-trastuzumab from DOTA-tetrazine conjugates (DOTA-Tz) and transcyclooctene-trastuzumab conjugates (TCO-trastuzumab). We first radiolabeled DOTA-Tz with 89 Zr in a reaction solution of MeOH and HEPES buffer and then used a click reaction to obtain [ 89 Zr]Zr-DOTA-Tz/TCO-trastuzumab. We performed biodistribution studies and PET imaging with [ 89 Zr]Zr-DOTA-trastuzumab in a mouse model of HER2-positive ovarian cancer, SKOV3 xenograft mice at 24, 72, and 144 hours post-injection and compared these data with those of [ 89 Zr]Zr-DFO-trastuzumab. Results TCO-trastuzumab was radiolabeled with [ 89 Zr]Zr-DOTA-Tz in the two-step reaction in good radiochemical yield (57.8 ± 17.6%). HER2-positive tumors were clearly visualized with [ 89 Zr]Zr-DOTA-trastuzumab in PET imaging studies. The temporal profile changes of 89 Zr radioactivity in SKOV3 tumors and bone marrow were sufficiently different between [ 89 Zr]Zr-DOTA-trastuzumab and [ 89 Zr]Zr-DFO-trastuzumab (P < 0.05). Conclusion: [ 89 Zr]Zr-DOTA-trastuzumab can be produced by the two-step radiolabeling reaction based on the Tz/TCO click reaction. Presumably, 89 Zr released from DFO is not negligible. In contrast, [ 89 Zr]Zr-DOTA-mAb would better predict the biodistribution of [ 177 Lu]Lu- or [ 225 Ac]Ac-DOTA-mAb than [ 89 Zr]Zr-DFO-mAb, thus avoiding the use of different chelator for 89 Zr at the expense of the click chemistry step. Graphical Abstract
The atomic force microscope (AFM) has been widely used for research of nanotechnorogy. for instruments Recently, we analyzed machine immitance of the comb-drive actuator, and observed clear nonlinear characteristic of the machine admittance near the resonance frequency. We made a probe with comb-drive actuator. When the probe touched to the substrate, we found out that the mechanical immitance characteristics near the resonance changed. It is possible to make a device, it is able to measured ruggedness image using that characteristic. In addition, we observed self-oscillation in this device with a circuit make a positive feedback loop. This is same as characteristic of a crystal oscillator. Self oscillation frequency of comb-drive actuator is change when the probe touched the opposing substrate. We make a PID control circuit for control a stage, therefore the probe was hold soft contact position with opposing substrate. While the probe hold this position, it scan XY plane, we observe ruggedness image.
For the latest photomask fabrication, critical dimension (CD) control is required more for ArF lithography. To satisfy the requirement, Alternating Phase-Shifting Mask (Alt.PSM) is expected to be the most effective approach for resolution enhancement. We investigated the optimization of shifter structure and evaluated phase defect detectability for 130 to 100nm node ArF Alt.PSM. Considering the process and defect control, shifter trench type is the most popular approach. However, in order to achieve smaller CD on reticle, dual trench type becomes also necessary. Therefore, we investigated the performance of the two types of shifter structure, and we compared the optical characteristics. On the other hand, Using test reticles contained programmed phase defects of various shape and size, phase defect printability was analyzed with the Aerial Image Measurement System, MSM193, and phase defect detectability was evaluated with some inspection tools. As a result, the manufacturing technology of ArF Alt.PSM for 100nm node was established.
The connected control method (CCM) utilized reaction force between buildings as damping force by using connecting springs and dampers. The effectiveness of CCM has already been established in previous studies. In this paper, integrated connected control method (ICCM) with an experimental high-rise building split into four substructures is presented for a vibration control method to mitigate structural vibration by using internal damping force by CCM. To examine the effectiveness of ICCM, an experimental structure model split into four substructure is build and four dampers are introduced to realize experimental ICCM. Using this model, the effectiveness ICCM is investigated through computer simulations and experiments.
