In this paper is reported a method for measuring the thickness of a silicone nitride layers employed for fabricating silicon MEMS bi-morph structures. The method allows the precise evaluation of layer thickness by adopting Digital Holographic Microscope. The measurement is based on the fact that the silicon nitride layer is transparent to the visible light. The optical phase difference (OPD) between the light beam traveling through the layer and portion of the beam in air is measured exploiting an interferometric technique. The approach is very simple and can be utilized even for inspection of non-planar or stressed structures. Experimental values have been compared with ellipsometric measurements.
An automated Fourier-transform method of phase retrieval of moire interferometric fringe pattern is presented. The method is shown to provide fast and accurate determination of the phase information by removing the carrier without shifting in frequency domain the filtered Fourier spectrum of the carrier-modulated moire fringe pattern. The principle of the method is described and moire interferometric measurements with submicron sensitivity of the in-plane displacement fields of thick carbon fiber/graphite-PEEK composite laminates are analyzed as example of application of the technique.
Digital Holographic Microscopy (DHM) is an optical interferometric technique for not destructive testing of micro-electro-mechanical systems (MEMS). A characterization process based on a no-contact technique allows us to analyze deformations, warping, residual stress, cracks and more other defects of MEMS, without destroy them. The flexibility of this technique allows us to improve novel numerical reconstruction algorithm for the recovery of more information. The post processing of the acquired holograms allows to reduce noise, optical aberrations, defocusing. In particular, the hologram reconstruction process has been modified to obtain Extended Focus Images (EFI). In Digital holographic microscopy, the use of microscopy objectives with high magnifications, reduces the focus depth. This means that for extended object a single reconstructed image with all the details in focus is not possible to obtain. Using a multiple reconstruction process and opportune resizing algorithms a full focused reconstructed images of extended object has been obtained without any mechanical movement. In particular, the advantages of the EFI technique are unique for dynamical characterization by DHM of extended objects, where the techniques based on multiple acquisitions fail. The EFI technique has been applied to obtain a best focused reconstructed image and profile of some micromechanical systems. It is demonstrated that this new approach allows to improve the accuracy in the EFI image when compared to the previous experimental results. Focusing of zones at different quote has been obtained evidencing, shape, crack and deformation impossible to observe otherwise at the same time. Moreover, these technique of reconstruction and analysis can be advantageous in many other fields of application.
A new method for measuring simultaneously the thickness and the refractive index of a transparent plate is proposed. The method is based on a simple, variable lateral-shear, wavelength-scanning interferometer. To achieve highly accurate measurements of both refractive index n and thickness d we use several means to determine these two quantities. We finely tune a distributed-feedback diode laser light source to introduce a phase shift into the detected signal, whereas we make the sample rotate to produce variable lateral shearing. Phase shifting permits precise determination of the optical thickness, nd, whereas refractive index n is obtained from the retrieved phase of the overall interference signal for all incidence angles.
We investigate the defect-induced internal field in lithium niobate. By means of a full-field interferometric technique, a different electro-optic behaviour in opposite ferroelectric domains is observed due to an elastic component of internal field.
The propagation, in a shallow water, of nonlinear ring waves in the form of multisolitons is investigated theoretically. This is done by solving both analytically and numerically the cylindrical (also referred to as concentric) Korteweg-de Vries equation (cKdVE). The latter describes the propagation of weakly nonlinear and weakly dispersive ring waves in an incompressible, inviscid, and irrotational fluid. The spatiotemporal evolution is determined for a cylindrically symmetric response to the free fall of an initially given multisoliton ring. Analytically, localized solutions in the form of tilted solitons are found. They can be thought as single- or multiring solitons formed on a conic-modulated water surface, with an oblique asymptote in arbitrary radial direction (tilted boundary condition). Conversely, the ring solitons obtained from numerical solutions are localized single- or multiring structures (standard solitons), whose wings vanish along all radial directions (standard boundary conditions). It is found that the wave dynamics of these standard ring-type localized structures differs substantially from that of the tilted structures. A detailed analysis is performed to determine the main features of both multiring localized structures, particularly their break-up, multiplet formation, overlapping of pulses, overcoming of one pulse by another, "amplitude-width" complementarity, etc., that are typically ascribed to a solitonlike behavior. For all the localized structures investigated, the solitonlike character of the rings is found to be preserved during (almost) entire temporal evolution. Due to their cylindrical character, each ring belonging to one of these multiring localized structures experiences the physiological decay of the peak and the physiological increase of the width, respectively, while propagating ("amplitude-width" complementarity). As in the planar geometry, i.e., planar Korteweg-de Vries equation (pKdVE), we show that, in the case of the tilted analytical solutions, the instantaneous product P=(maximumamplitude)×(width)(2) is rigorously constant during all the soliton spatiotemporal evolution. Nevertheless, in the case of the numerical solutions, we show that this product is not preserved; i.e., the instantaneous physiological variations of both peak and width of each ring do not compensate each other as in the tilted analytical case. In fact, the amplitude decay occurs faster than the width increase, so that P decreases in time. This is more evident in the early times than in the asymptotic ones (where actually cKdVE reduces to pKdVE). This is in contrast to previous investigations on the early-time localized solutions of the cKdVE.
Resolution is an important issue in inspection of objects on microscopic scale. Various approaches have been investigated to increase the optical resolution behind the diffraction limit of an optical imaging system. Demonstration that super-resolution is possible have been also established in interference microscopy. We have studied the possibility to use diffraction gratings, in different experimental configurations for increasing the aperture of an optical imaging system. The aim of the study is to demonstrate that super-resolution is possible and is a practical and viable method for a coherent optical microscope. We take benefit of the numerical reconstruction properties of DH in combination with diffraction grating to get super-resolution. Various attempts have been performed and results are presented and discussed. The approaches could be used for metrology and imaging application in various fields of engineering and biology.
'%3e%3cpath fill='%23012169' d='M0 0v30h60V0z'/%3e%3cpath stroke='%23fff' stroke-width='6' d='m0 0 60 30m0-30L0 30'/%3e%3cpath stroke='%23C8102E' stroke-width='4' d='m0 0 60 30m0-30L0 30' clip-path='url(%23b)'/%3e%3cpath stroke='%23fff' stroke-width='10' d='M30 0v30M0 15h60'/%3e%3cpath stroke='%23C8102E' stroke-width='6' d='M30 0v30M0 15h60'/%3e%3c/g%3e%3c/svg%3e)
