M. Wackerle

Fraunhofer Research Institution for Microsystems and Solid State Technologies

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Martin Richter

Fraunhofer Research Institution for Microsystems and Solid State Technologies

Yücel Congar

Fraunhofer Research Institution for Microsystems and Solid State Technologies

U. Schaber

Fraunhofer Research Institution for Microsystems and Solid State Technologies

J. Kruckow

Fraunhofer Institute for Reliability and Microintegration

David A. Barrow

Cardiff University

Agnes Bußmann

Fraunhofer Research Institution for Microsystems and Solid State Technologies

S. Kibler

Fraunhofer Research Institution for Microsystems and Solid State Technologies

Doris Zhou

Fraunhofer Research Institution for Microsystems and Solid State Technologies

Henry Leistner

Fraunhofer Research Institution for Microsystems and Solid State Technologies

G. Neumayer

Fraunhofer Institute for Reliability and Microintegration

Cooperative Institutions

Fraunhofer Institute for Reliability and Microintegration

Fraunhofer Research Institution for Microsystems and Solid State Technologies

Fraunhofer Institute for Microelectronic Circuits and Systems

Fraunhofer Society

Technical University of Munich

Karlsruhe Institute of Technology

Festo (Germany)

Fraunhofer Institute for Biomedical Engineering

Fraunhofer Institute for Organic Electronics, Electron Beam and Plasma Technology

Goethe University Frankfurt

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Experimental characterisation of piezoelectric silicon micropump for drug delivery applications

Agnes Bußmann Henry Leistner Doris Zhou M. Wackerle Yücel Congar

10.24406/fordatis/143

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Citations (0)

Packaging of bio-MEMS: strategies, technologies, and applications

IEEE Transactions on Advanced Packaging (2005)

Thomas Velten H.H. Ruf David A. Barrow Nikos Aspragathos P. Lazarou

Biomicroelectromechanical systems (bio-MEMS) are MEMS which are designed for medical or biological applications. As with other MEMS, bio-MEMS frequently, have to be packaged to provide an interface to the macroscale world of the user. Bio-MEMS can be roughly divided in two groups. Bio-MEMS can be pure technical systems applied in a biological environment or technical systems which integrate biological materials as one functional component of the system. In both cases, the materials which have intimate contact to biological matter have to be biocompatible to avoid unintentional effects on the biological substances, which in case of medical implants, could harm the patient. In the case of biosensors, the use of nonbiocompatible materials could interfere with the biological subcomponents which would affect the sensor's performance. Bio-MEMS containing biological subcomponents require the use of "biocompatible" technologies for assembly and packaging; e.g., high temperatures occurring, for instance, during thermosonic wire bonding and other thermobonding processes would denature the bioaffinity layers on biosensor chips. This means that the use of selected or alternative packaging and assembly methods, or new strategies, is necessary for a wide range of bio-MEMS applications. This paper provides an overview of some of the strategies, technologies, and applications in the field of bio-MEMS packaging. It includes the following: strategies for the partitioning of subsystems within integrated microsystems for (bio)chemical analysis/synthesis; methods for microassembly of bio-MEMS; technologies for bonding of polymer bio-MEMS components; packaging of miniature medical devices; packaging of biosensors for in vitro applications; packaging of micropumps as a bio-MEMS component. The applications discussed are derived from different fields to demonstrate the plethora of bio-MEMS considerations. In commercial production, packaging is possibly the major cost factor of bio-MEMS-based products, and its development requires special attention.

Microsystem

Biocompatible material

Electronic Packaging

10.1109/tadvp.2005.858427

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Citations (97)

SPECIAL SECTION ON PACKAGING FOR MICRO- AND NANOSCALE SYSTEMS

Thomas Velten H.H. Ruf David A. Barrow N. Aspragathos Παναγιώτης Λαζάρου

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Development of a multi-material micropump

Proceedings of the Institution of Mechanical Engineers Part C Journal of Mechanical Engineering Science (2006)

Martin Richter Yücel Congar Joseph Nissen G. Neumayer Kaiser Heinrich

In this paper, the design of a multi-material micropump will be described. The micropump inhibits a very simple design and therefore is very cost efficient. The pump consists of one plastic part, one metal diaphragm, and three piezo lead-zirconate titanate (PZT) ceramics. The PZT ceramics, glued on a metal diaphragm, form two active valves (inlet and outlet valve) and one actuation diaphragm. The valve seats, the pump chamber, and the inlet/outlet interfacing channels are formed in the plastic body. Due to its function principle, the micropump is able to pump bidirectionally. The design of the micropump covers bubble tolerant and self-priming features. Therefore, design measures have been carried out to realize a large compression ratio and to reduce the capillary pressures of bubbles in the pump chamber. The pump is able to handle gases and liquids. The plastic body is made of poly-ether-ether-ketone, and the metal diaphragm is made of stainless steel. Therefore, a good chemical resistance will be given. First prototypes of the actuation unit have been manufactured and tested successfully. Each actuation unit is able to performa stroke ofmore than 40 μm. Furthermore, the plastic body has been realized by milling, and preliminary measurements were carried out. For future work, the development and optimization of an improved micropump using microinjection moulding instead of milling are envisaged.

Diaphragm (acoustics)

Diaphragm pump

10.1243/0954406jmes289

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Citations (6)

Multistage Micropump System towards Vacuum Pressure

Actuators (2023)

Martin Richter Daniel Anheuer Axel Wille Yuecel Congar M. Wackerle

Fraunhofer EMFT’s research and manufacturing portfolio includes piezoelectrically actuated silicon micro diaphragm pumps with passive flap valves. Research and development in the field of microfluidics have been dedicated for many years to the use of micropumps for generating positive and negative pressures, as well as delivering various media. However, for some applications, only small amounts of fluid need to be pumped, compressed, or evacuated, and until now, only macroscopic pumps with high power consumption have been able to achieve the necessary flow rate and pressure, especially for compressible media such as air. To address these requirements, one potential approach is to use a multistage of high-performing micropumps optimized to negative pressure. In this paper, we present several possible ways to cascade piezoelectric silicon micropumps with passive flap valves to achieve these stringent requirements. Initially, simulations are conducted to generate negative pressures with different cascading methods. The first multistage option assumes pressure equalization over the piezo-actuator by the upstream pump, while for the second case, the actuator diaphragm operates against atmospheric pressure. Subsequently, measurement results for the generation of negative gas pressures down to −82.1 kPa relative to atmospheric pressure (19.2 kPa absolute) with a multistage of three micropumps are presented. This research enables further miniaturization of many applications with high-performance requirements for micropumps, achievable with these multistage systems.

Diaphragm (acoustics)

Pressure measurement

10.3390/act12060227

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Citations (1)

Pneumatic Silicon Microvalves with Piezoelectric Actuation

Springer eBooks (2001)

Stefan Kluge G. Neumayer U. Schaber M. Wackerle M. Maichl

Leakage (economics)

10.1007/978-3-642-59497-7_212

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Citations (13)

Supplementary Administration of Serum Protein Solution during Shock Resuscitation in the Rat

European Journal of Trauma (2004)

Marcus Maier M. Wackerle Carsten Herzog Ingo Marzi

Serum Albumin

10.1007/s00068-004-1376-y

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Citations (2)

Batch Fabrication of Silicon Micropumps

Springer eBooks (2001)

Martin Richter J. Kruckow J. Weidhaas M. Wackerle A. Drost

Die preparation

Wafer backgrinding

Wafer testing

Wafer Bonding

Wafer fabrication

10.1007/978-3-642-59497-7_215

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Citations (10)

Piezoelectric Silicon Micropump for Drug Delivery Applications

Applied Sciences (2021)

Agnes Bußmann Henry Leistner Doris Zhou M. Wackerle Yücel Congar

Subcutaneous injection is crucial for the treatment of many diseases. Especially for regular or continuous injections, automated dosing is beneficial. However, existing devices are large, uncomfortable, visible under clothing, or interfere with physical activity. Thus, the development of small, energy efficient and reliable patch pumps or implantable systems is necessary and research on microelectromechanical system (MEMS) based drug delivery devices has gained increasing interest. However, the requirements of medical applications are challenging and especially the dosing precision and reliability of MEMS pumps are not yet sufficiently evaluated. To enable further miniaturization, we propose a precise 5 × 5 mm2 silicon micropump. Detailed experimental evaluation of ten pumps proves a backpressure capability with air of 12.5 ± 0.8 kPa, which indicates the ability to transport bubbles. The maximal water flow rate is 74 ± 6 µL/min and the pumps’ average blocking pressure is 51 kPa. The evaluation of the dosing precision for bolus deliveries with water and insulin shows a high repeatability of dosed package volumes. The pumps show a mean standard deviation of only 0.02 mg for 0.5 mg packages, and therefore, stay below the generally accepted 5% deviation, even for this extremely small amount. The high precision enables the combination with higher concentrated medication and is the foundation for the development of an extremely miniaturized patch pump.

Syringe driver

10.3390/app11178008

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Citations (23)

C5.2 - Miniaturized drug delivery system TUDOS with accurate metering of microliter volumes

Proceedings SENSOR 2011 (2013)

Martin Richter M. Wackerle S. Kibler Margit Biehl Thomas Koch

A miniaturized drug delivery system for accurate dosing of drugs for therapy of cancer is presented. The weight of the system is less than 8 grams. Silicon micropumps with a stroke volume of 88 nl, and blocking pressure of 6 bar, drive the system. A novel and accurate flow monitoring principle based on capacitance measurement was developed and implemented into the drug delivery system. To prevent free flow, a self blocking safety valve was adapted to the drug micropump. Moreover, further safety features like catheter blockage detection, pump failure detection, bubble detection and a bubble separator was realized. System control and driver electronics to supply the pumps with high voltage was realized on a tiny flex PCB and integrated. System tests showed, that test dosing volumes of 12 μl can be delivered reliably with accuracy better than 4 %. The system is now ready for animal trial (rat model) for a new cancer therapy approach.

10.5162/sensor2013/c5.2

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Citations (4)