V. Striano

OHB (Italy)

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Giuseppe Coppola

National Research Council

Pietro Ferraro

National Research Council

Sergio De Nicola

University of Maryland, College Park

Andrea Fińizio

Institute of Applied Science and Intelligent Systems

G. Pierattini

Istituto di Cibernetica “Eduardo Caianiello”

Domenico Alfieri

National Institute of Optics

Maria Antonietta Ferrara

National Research Council

Simonetta Grilli

Institute of Applied Science and Intelligent Systems

G. Bianco

Institute for Microelectronics and Microsystems

Fabio Borbone

University of Naples Federico II

Cooperative Institutions

University of Naples Federico II

National Research Council

Institute of Applied Science and Intelligent Systems

National Academies of Sciences, Engineering, and Medicine

Institute for Microelectronics and Microsystems

National Institute of Optics

Istituto di Cibernetica “Eduardo Caianiello”

Ingegneria dei Sistemi (Italy)

University of Milan

Istituto Nazionale di Fisica Nucleare, Sezione di Napoli

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Interferometric measurement of thickness of silicon nitride layer in bi-morph silicon MEMS

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE (2006)

Pietro Ferraro Melania Paturzo Sergio De Nicola Andrea Fińizio G. Pierattini

In this paper is reported a method for measuring the thickness of a silicone nitride layers employed for fabricating silicon MEMS bi-morph structures. The method allows the precise evaluation of layer thickness by adopting Digital Holographic Microscope. The measurement is based on the fact that the silicon nitride layer is transparent to the visible light. The optical phase difference (OPD) between the light beam traveling through the layer and portion of the beam in air is measured exploiting an interferometric technique. The approach is very simple and can be utilized even for inspection of non-planar or stressed structures. Experimental values have been compared with ellipsometric measurements.

10.1117/12.664096

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Improvement of the reconstruction algorithm for extended focus image of MEMS by digital holography

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE (2006)

V. Striano Giuseppe Coppola Pietro Ferraro Domenico Alfieri Simonetta Grilli

Digital Holographic Microscopy (DHM) is an optical interferometric technique for not destructive testing of micro-electro-mechanical systems (MEMS). A characterization process based on a no-contact technique allows us to analyze deformations, warping, residual stress, cracks and more other defects of MEMS, without destroy them. The flexibility of this technique allows us to improve novel numerical reconstruction algorithm for the recovery of more information. The post processing of the acquired holograms allows to reduce noise, optical aberrations, defocusing. In particular, the hologram reconstruction process has been modified to obtain Extended Focus Images (EFI). In Digital holographic microscopy, the use of microscopy objectives with high magnifications, reduces the focus depth. This means that for extended object a single reconstructed image with all the details in focus is not possible to obtain. Using a multiple reconstruction process and opportune resizing algorithms a full focused reconstructed images of extended object has been obtained without any mechanical movement. In particular, the advantages of the EFI technique are unique for dynamical characterization by DHM of extended objects, where the techniques based on multiple acquisitions fail. The EFI technique has been applied to obtain a best focused reconstructed image and profile of some micromechanical systems. It is demonstrated that this new approach allows to improve the accuracy in the EFI image when compared to the previous experimental results. Focusing of zones at different quote has been obtained evidencing, shape, crack and deformation impossible to observe otherwise at the same time. Moreover, these technique of reconstruction and analysis can be advantageous in many other fields of application.

Digital Holographic Microscopy

Digital holography

Characterization

Autofocus

10.1117/12.695465

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Analysis of the Actuation of an RF-MEMS by Means of Digital Holography

Journal of Holography and Speckle (2009)

Giuseppe Coppola V. Striano Sergio De Nicola Andrea Fińizio Pietro Ferraro

Digital holography

10.1166/jhs.2009.1012

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Citations (1)

Volume Phase Holographic Lenses for Efficient Planar Solar Track-Concentrators

Lecture notes in electrical engineering (2020)

Maria Antonietta Ferrara G. Bianco V. Striano Giuseppe Coppola

Overheating (electricity)

Concentrator

10.1007/978-3-030-37558-4_2

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A preliminary feasibility analysis of a new data-relay small satellites constellation

2022 IEEE 9th International Workshop on Metrology for AeroSpace (MetroAeroSpace) (2022)

Carla Cicala Chiara Abbundo Stefano Cannavacciuolo Maria Daniela Graziano V. Striano

The paper shows a preliminary feasibility analysis of a space project both economic and structural. The project consists of launching a new business for suppling near real time connection to EO LEO satellite through a bent pipe satellite constellation. The result of business analysis highlights a good return in the next decade which is acceptable for an innovative project in space market. Nowadays the target customer groups 146 satellites which could choose among three different kinds of subscription and pay between 10 and 20 euros per minute of downlink. The design constellation is created with experts' opinion: they have been interviewed with survey and analysed with AHP, which gives high relevance to listening window width. As concerns satellite platform, quite all of satellite subsystems have a TRL 9, for the remaining it has been destinated a large budget of research and development. Due to an estimation method of power and mass, it has been possible to evaluate the size of each satellite and the required power: satellite will have a dry mass of 25 kg approximatively and require 260 Watt of power. Due to details of each subsystem, it has been realised a 3D model with Catia v5 to visualize the satellite.

Link budget

Satellite constellation

CubeSat

Communications satellite

10.1109/metroaerospace54187.2022.9856195

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Development of a fiber optic health monitoring system for aerospace applications

Optoelectronics Letters (2007)

V. Striano V. Latini Giuseppe Coppola Ivo Rendina

Structural Health Monitoring

Strain (injury)

Fiber Bragg Grating

10.1007/s11801-007-6202-4

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Citations (1)

Applications of the digital holography to the dynamic characterization of MEMS: a micromechanical shunt switch and a micro-gassensor

V. Striano Giuseppe Coppola Pietro Ferraro Domenico Alfieri Sergio De Nicola

Digital holography is a valid instrument for characterization of micro-electro-mechanical systems (MEMS) with an high resolution and accuracy. In the this paper a brief introduction on the digital holographic microscope will be given, reporting the numerical approach utilized to reduce aberrations, unwrapping phase errors and defocusing of the reconstructed images. Moreover, we present the experimental results on the dynamic characterization of two macrostructured devices. In particular, a dynamic characterization of a micromechanical shunt switch in coplanar waveguide configuration, for microwave application, and a MEMS gas sensor, based on a Pt heater resistor on a Si/sub 3/N/sub 4/ membrane, has been analyzed.

Characterization

Digital holography

Coplanar waveguide

Digital microscope

10.1109/wfopc.2005.1462105

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Multiplexed holographic lenses : realization and optical characterization

G. Bianco Pietro Ferraro V. Striano Vito Pagliarulo Giuseppe Coppola

Solar panels in both space (satellites) and earth applications have a fundamental problem related to their pointing with a right angle towards the sun. In fact, a correct pointing of the sun could improve energy efficiency produced by the panels. In this paper, with the aim to obtain a solar concentrator, we present the realization of Volume Holographic Optical Elements (V-HOEs), such as holographic lenses, by means of an interferometric recording set-up (Michelson type), and their characterization. The recording material was a photopolymer sensitive to light at wavelength of 532 nm. In particular, using multiplexed holographic lenses, the mechanical unit for the correct pointing of the solar panels can be eliminated. As a result, there are less problems related both to the wear of moving parts and possible vibrations due to movements. This is possible if, during the writing process, the photosensitive support is used to record different holograms by changing the angle of incidence of the object and reference wavefronts. In this way, a V-HOE that addresses the solar radiation incident with different angles, on a single photovoltaic cell, can be realized.

Realization (probability)

Concentrator

Reflector (photography)

Fresnel lens

10.1049/cp.2015.0165

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Citations (4)

Rolling Stocks: A Machine Learning Predictive Maintenance Architecture

Communications in computer and information science (2020)

Roberto Nappi V. Striano Gianluca Cutrera Antonio Vigliotti Giuseppe Franzè

10.1007/978-3-030-58462-7_6

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Citations (2)

Extended focused image in microscopy by digital holography

Optics Express (2005)

Pietro Ferraro Simonetta Grilli Domenico Alfieri Sergio De Nicola Andrea Fińizio

In microscopy, high magnifications are achievable for investigating micro-objects but the paradigm is that higher is the required magnification, lower is the depth of focus. For an object having a three-dimensional (3D) complex shape only a portion of it appears in good focus to the observer who is essentially looking at a single image plane. Actually, two approaches exist to obtain an extended focused image, both having severe limitations since the first requires mechanical scanning while the other one requires specially designed optics. We demonstrate that an extended focused image of an object can be obtained through digital holography without any mechanical scanning or special optical components. The conceptual novelty of the proposed approach lies in the fact that it is possible to completely exploit the unique feature of DH in extracting all the information content stored in hologram, amplitude and phase, to extend the depth of focus.

Digital Holographic Microscopy

Digital holography

Image plane

10.1364/opex.13.006738

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Citations (246)