Simple and efficient nanofabrication technology with low cost and high flexibility is indispensable for fundamental nanoscale research and prototyping. Lithography in the near field using the surface plasmon polariton (i.e., plasmonic lithography) provides a promising solution. The system with high stiffness passive nanogap control strategy on a high-speed rotating substrate is one of the most attractive high-throughput methods. However, a smaller and steadier plasmonic nanogap, new scheme of plasmonic lens, and parallel processing should be explored to achieve a new generation high resolution and reliable efficient nanofabrication. Herein, a parallel plasmonic direct-writing nanolithography system is established in which a novel plasmonic flying head is systematically designed to achieve around 15 nm minimum flying-height with high parallelism at the rotating speed of 8–18 m·s−1. A multi-stage metasurface-based polarization insensitive plasmonic lens is proposed to couple more power and realize a more confined spot compared with conventional plasmonic lenses. Parallel lithography of the nanostructures with the smallest (around 26 nm) linewidth is obtained with the prototyping system. The proposed system holds great potential for high-freedom nanofabrication with low cost, such as planar optical elements and nano-electromechanical systems.
Conducting polymers have emerged as promising active materials for metasurfaces due to their electrically tunable states and large refractive index modulation. However, existing approaches are often limited to infrared operation or single-polymer systems, restricting their versatility. In this Letter, we present organic metasurfaces featuring dual conducting polymers, polyaniline (PANI) and poly(3,4-ethylenedioxythiophene) (PEDOT), to achieve contrasting dynamic optical responses at visible frequencies. Sequential electrochemical polymerizations locally conjugate subwavelength-thin layers of PANI and PEDOT onto preselected gold nanorods, creating electro-plasmonic antennas with distinct optoelectronic properties. This dual-polymer approach enables dynamic metasurface pixel control without individual electrode routing, thereby simplifying active metasurface designs. The metasurfaces exhibit dual-channel functions, including anomalous transmission and holography, through the redox-state switching of both polymers. Our work underscores the potential of conducting polymers for active metasurface applications, offering a pathway to advanced reconfigurable optical devices at visible frequencies.
Tunable metasurfaces provide a compact and efficient strategy for optical active wavefront shaping. Varifocal metalens is one of the most important applications. However, the existing tunable metalens rarely serves broadband wavelengths restricting their applications in broadband imaging and color display due to chromatic aberration. Herein, an electrically tunable polarization-multiplexed achromatic metalens integrated with twisted nematic liquid crystals (TNLCs) in the visible region is demonstrated. The phase profiles at different wavelengths under two orthogonal polarization channels are customized by the particle swarm optimization algorithm and matched with the dielectric metaunits database to achieve polarization-multiplexed achromatic performance. By combining the broadband linear polarization conversion ability of TNLC, the tunability of varifocal achromatic metalens is realized by applying different voltages. Further, the electrically tunable customized dispersion-manipulated metalens and switchable color metaholograms are demonstrated. The proposed devices will accelerate the application of metasurfaces in broadband zoom imaging, AR/VR displays and spectral detection.
Meta-optics, with unique light-matter interactions and extensive design space, underpins versatile and compact optical devices through flexible multi-parameter light field control. However, conventional designs struggle with the intricate interdependencies of nano-structural complex responses across wavelengths and polarizations at a system level, hindering high-performance full-light field control. Here, a neural network-assisted end-to-end design framework that facilitates global, gradient-based optimization of multifunctional meta-optics layouts for full light field control is proposed. Its superiority over separated design is showcased by utilizing the limited design space for multi-wavelength-polarization holography with enhanced performance (e.g., ≈6 × structural similarity index experimentally). By harnessing the dispersive full-parameter Jones matrix, orthogonal tri-polarization multi-wavelength-depth holography is further demonstrated, breaking conventional channel limitations. To highlight its versatility, non-orthogonal polarizations (>3) are showcased for arbitrary polarized-spectral multi-information processing applications in display, imaging, and computing. The comprehensive framework elevates light field control in meta-optics, delivering superior performance, enhanced functionality, and improved reliability, thereby paving the way for next-generation intelligent optical technologies.
Metasurfaces enable the design of optical elements by engineering the wavefront of light at the subwavelength scale. Due to their ultrathin and compact characteristics, metasurfaces possess great potential to integrate multiple functions in optoelectronic systems for optical device miniaturisation. However, current research based on multiplexing in the 2D plane has not fully utilised the capabilities of metasurfaces for multi-tasking applications. Here, we demonstrate a 3D-integrated metasurface device by stacking a hologram metasurface on a monolithic Fabry-Pérot cavity-based colour filter microarray to simultaneously achieve low-crosstalk, polarisation-independent, high-efficiency, full-colour holography, and microprint. The dual functions of the device outline a novel scheme for data recording, security encryption, colour displays, and information processing. Our 3D integration concept can be extended to achieve multi-tasking flat optical systems by including a variety of functional metasurface layers, such as polarizers, metalenses, and others.
Abstract Optical encryption with multichannel, high complexity, and artistry characteristics has become one of the most significant approaches for modern information security. Recently emerged metasurface‐based optics consisting of planar subwavelength metamaterials has been engineered as an ideal platform for optical encryption because of its capability of manipulating various optical parameters and enhancing information storage capacity. However, limited encrypted channels and insufficient real‐time encryption abilities hinder its practical applications. A novel integrated metasurface is proposed, which can regulate the amplitude, phase, and polarization of light wave simultaneously to realize the combination of microprint and helicity‐multiplexed meta‐holography with negligible crosstalk. By encoding an online editable quick response code into the microprint as a keystore, an optical encryption device is demonstrated with 2 6 ‐1 storage capacity endowed by wavelength‐ and helicity‐dependent hologram images that can be employed in real time. The integration scheme enables multidimensional information storage and real‐time encryption and decryption capability, which provides an approachable way for the practical application of metasurface devices in the field of optical encryption.
We theoretically study the high-order harmonics and single attosecond pulse generation from a pre-excited He+ ion in a multicycle two-color spatially inhomogeneous field. It is shown that the broadband supercontinuum spectrum and single quantum path selection can be realized, and then a single 15.2 as pulse is directly obtained. By appending a uv attosecond pulse to the two-color spatially inhomogeneous field at a proper time, the conversion efficiency of the high-energy part of the supercontinuum is improved by at least an order of magnitude, which enables the production of an intense single 17.3 as pulse.
Metasurfaces can perform high-performance multi-functional integration by manipulating the abundant physical dimensions of light, demonstrating great potential in high-capacity information technologies. The orbital angular momentum (OAM) and spin angular momentum (SAM) dimensions have been respectively explored as the independent carrier for information multiplexing. However, fully managing these two intrinsic properties in information multiplexing remains elusive. Here, we propose the concept of angular momentum (AM) holography which can fully synergize these two fundamental dimensions to act as the information carrier, via a single-layer, non-interleaved metasurface. The underlying mechanism relies on independently controlling the two spin eigenstates and arbitrary overlaying them in each operation channel, thereby spatially modulating the resulting waveform at will. As a proof of concept, we demonstrate an AM meta-hologram allowing the reconstruction of two sets of holographic images, i.e., the spin-orbital locked and the spin-superimposed ones. Remarkably, leveraging the designed dual-functional AM meta-hologram, we demonstrate a novel optical nested encryption scheme, which is able to achieve parallel information transmission with ultra-high capacity and security. Our work opens a new avenue for optionally manipulating the AM, holding promising applications in the fields of optical communication, information security and quantum science.