【Anodic aluminum oxides (AAO) fabricated by the two-step anodizing process have attracted much attention for the fabrication of nano template because of pore structure with high aspect ratio, low cost process and ease of fabrication. AAOs are characterized by a homogeneous morphology of parallel pores that grow perpendicular to the template surface with a narrow distribution of diameter, length and inter-pores spacing, all of which can be easily controlled by suitably choosing of the anodizing parameters such as pH of the electrolyte, anodizing voltage and duration of anodizing. In this study, AAO templates were characterized by X-ray diffraction and field-emission scanning electron microscope (FE-SEM). The dependence of the pore size change according to the amount of addition of phosphoric acid, which was used to remove the initial alumina oxide layer, was not observed.】
YBCO thin films on SiO2/Si substrate were fabricated by spin-coaing of an alkoxide-derived precursor and heat treatment. The structural and electrical properties of the YBCO films were investigated as functions of annealing temperature at 600∼800℃. Although YBCO single phase was not synthesized, dense films of YBCO matrix phase and minor second phases have been successfully fabricated at the annealing temperatures of 650∼800℃. Thickness and temperature coefficient of resistance (TCR) of YBCO thin films with annealing temperature of 750℃ were 0.31 μm and -2.92%/℃,respectively.
전해질-유전체-금속 (EDM) 구조의 센서를 양극산화알루미늄을 기반으로 제작을 하였다. 양극산화공정 중 온도에 변수를 두어 센서를 제작하고자 하였다. 액체와 고체사이의 접촉전위 차로 인해 전기 이중층이 형성이 되게 되고, 전기이중층의 면적은 전해질의 농도와 유전체가 가지고 있는 유전율, 그리고 유전체의 성질에 따라 변하게 된다. 알루미나는 고유전율이며 친수성을 띄어 센서로서의 응용이 좋다. 그리고 양극산화공정을 통하여 기존의 반도체 공정보다 쉽게 제작이 가능하다. 아노다이징 온도에 따라 생성된 알루미나 막의 두께가 차이가 나고, 그에 따라 감지성능과 안정성이 변화하는 것으로 나타났다.
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