Many micromachined electroacoustic devices use thin plates in conjunction with electrical components to measure acoustic signals. Composite layers are needed for electrical passivation, moisture barriers, etc. The layers often contain residual stresses introduced during the fabrication process. Accurate models of the composite plate mechanics are crucial for predicting and optimizing device performance. In this paper, the von Kármán plate theory is implemented for a transversely isotropic, axisymmetric plate with in-plane tensile stress and uniform transverse pressure loading. A numerical solution of the coupled force-displacement nonlinear differential equations is found using an iterative technique. The results are verified using finite element analysis. This paper contains a study of the effects of tensile residual stresses on the displacement field and examines the transition between linear and nonlinear behavior. The results demonstrate that stress stiffening in the composite plate delays the onset of nonlinear deflections and decreases the mechanical sensitivity. In addition, under high stress the plate behavior transitions to that of a membrane and becomes insensitive to the composite nature of the plate. The results suggest a tradeoff between mechanical sensitivity and linearity.

Composite plate

Plate theory

Stiffening

10.1115/1.4005534

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Citations (4)

P2F-2 Vibration of Post-Buckled Homogeneous Circular Plates

Proceedings/Proceedings - IEEE Ultrasonics Symposium (2007)

Matthew D. Williams Benjamin Griffin Brian Homeijer Bhavani V. Sankar Mark Sheplak

The dynamic behavior of an axisymmetric post- buckled circular plate with initial in-plane compression loading is investigated. The static von Karman plate equations are solved numerically for clamped boundary conditions. The static solution is presented for a range of transverse and in-plane loads. Lumped element modeling is used to calculate the mass and compliance of the plate from results of the static solution. The resonant frequency, sensitivity, and maximum linear transverse pressure are calculated for a variety of in-plane loads. These solutions can be used to predict the post-buckled behavior of micromachined plates.

Plate theory

10.1109/ultsym.2007.407

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Citations (2)

A Novel Rotating Flexure-Test Technique for Brittle Materials with Circular Geometries

Experimental Techniques (2022)

Michael MacIsaac Salil Bavdekar James Nance Bhavani V. Sankar N.-H. Kim

Brittleness

Test fixture

Fixture

10.1007/s40799-022-00565-6

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