Jitendra Pal

Carnegie Mellon University

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Yong Zhu

Griffith University

Junwei Lu

Hefei University of Technology

Fahimullah Khan

King Abdullah University of Science and Technology

Dzung Viet Dao

Griffith University

D. Piazza

University of Bern

Francesco Donzelli

University of Bologna

James A. Bain

Carnegie Mellon University

Gianluca Piazza

Carnegie Mellon University

Kaustubh Deshpande

Rashtrasant Tukadoji Maharaj Nagpur University

Lou Chomas

Carnegie Mellon University

Cooperative Institutions

Carnegie Mellon University

Griffith University

Agency for Science, Technology and Research

Tsinghua University

Harbin Institute of Technology

Institute of Microelectronics

Singapore University of Technology and Design

University of California, Santa Barbara

University of Pittsburgh

Jadavpur University

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無線用の高出力で信頼性の高いSPST/SP3T RF MEMSスイッチ

IEEE Electron Device Letters (2016)

Jitendra Pal Yao Zhu Junwei Lu Dzung Viet Dao Fahimullah Khan

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Citations (0)

A novel electrothermally actuated RF MEMS switch for wireless applications

2022 IEEE 17th Conference on Industrial Electronics and Applications (ICIEA) (2013)

Jitendra Pal Yong Zhu Junwei Lu Dzung Viet Dao

This paper presents a new type of thermally actuated switch for wireless communication system operated at low gigahertz frequencies. The switch is driven by a metal electrothermal actuator, which can generate large displacement and high contact force at lower temperatures. The MEMS switch utilizing the parallel four-beam actuator requires driving voltage of 0.07 V for an 8 μm displacement. RF performances are improved by suspending the structure 25 μm from the substrate using MetalMumps process. An ON state insertion loss of -0.27 dB at 10 GHz and an OFF state isolation of -40 dB at 10 GHz are achieved on low resistivity silicon substrate.

RF switch

10.1109/iciea.2013.6566623

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Magnetically actuated reconfigurable pixelated antenna

Jitendra Pal Kaustubh Deshpande Lou Chomas S. Santhanam Francesco Donzelli

In this paper, a 6-element pixelated antenna with reconfigurable resonance frequency and polarization is presented. Reconfiguration is achieved by mechanically connecting/disconnecting 6 movable Ni patches to/from fixed Cu patches, hence realizing patch antennas of different sizes and shape. Each movable patch is a cantilevered plate, micro-fabricated from a Ni layer plated on an RT Duroid substrate. The Ni patch is magnetically actuated by means of an electro-permanent magnet (EPM) placed behind the ground plane of the antenna. Since the Ni patch is itself part of the radiating element, this approach eliminates the need to insert an external switch on the antenna plane. The EPM is placed behind the ground plane, therefore eliminating losses associated with bias lines generally used in pixelated antennas. Most importantly, the very low mechanical contact resistance (as low as 200 mΩ) between the Ni and Cu patch ensures high antenna efficiency. The EPM enables latching of the magnetic actuator, hence resulting in zero static configuration power consumption. Measured resonance frequency reconfigurability, radiation pattern and radiation efficiency agree well with simulated data.

Ground plane

Reconfigurability

Patch antenna

Reconfigurable antenna

10.1109/memsys.2018.8346674

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Study on contact resistance in single-contact and multi-contact MEMS switches

Microelectronic Engineering (2015)

Jitendra Pal Yong Zhu Dzung Viet Dao Junwei Lu Fahimullah Khan

Contact resistance

10.1016/j.mee.2015.02.021

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A novel single metal layer MEMS-based step-down transformer

Microelectronics Journal (2016)

Fahimullah Khan Yong Zhu Junwei Lu Jitendra Pal

This paper presents for the first time single metal layer step-down on-chip transformer. The design is characterized for VHF and UHF frequency ranges. The prototype is coreless (air core), which is suitable for high frequency operations. The design is fabricated in a standard Metal-MUMPs fabrication process, which offers a single structure layer. The primary inductance of 10.7 nH and the transformer quality factor of 8.8 have been achieved at 1 GHz. The coupling coefficient is 0.60 and the efficiency is 76% with matched load at 1 GHz. The total footprint area of micro-transformer is 0.49 mm2.

10.1016/j.mejo.2016.09.003

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Low-Voltage and High-Reliability RF MEMS Switch with Combined Electrothermal and Electrostatic Actuation

Micromachines (2021)

Yong Zhu Jitendra Pal

In this paper, we report a novel laterally actuated Radio Frequency (RF) Microelectromechanical Systems (MEMS) switch, which is based on a combination of electrothermal actuation and electrostatic latching hold. The switch takes the advantages of both actuation mechanisms: large actuation force, low actuation voltage, and high reliability of the thermal actuation for initial movement; and low power consumption of the electrostatic actuation for holding the switch in position in ON state. The switch with an initial switch gap of 7 µm has an electrothermal actuation voltage of 7 V and an electrostatic holding voltage of 21 V. The switch achieves superior RF performances: the measured insertion loss is -0.73 dB at 6 GHz, whereas the isolation is -46 dB at 6 GHz. In addition, the switch shows high reliability and power handling capability: the switch can operate up to 10 million cycles without failure with 1 W power applied to its signal line.

RF switch

SIGNAL (programming language)

10.3390/mi12101237

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Magnetically reconfigurable pixelated antenna

Microwave and Optical Technology Letters (2019)

Jitendra Pal Francesco Donzelli D. Piazza James A. Bain Gianluca Piazza

Abstract In this article, a total of 70 movable nickel (Ni) patches are monolithically integrated with fixed copper (Cu) elements to form a reconfigurable patch antenna. The Ni patches are magnetically actuated by means of an array of permanent magnets (PM) placed behind the ground plane of the antenna. The Ni patches establish low resistance mechanical contact between two fixed Cu patches due to the high contact force generated by the PM. Since the Ni patch is itself part of the radiating element, this approach eliminates the need to insert an external switch on the antenna plane. The PMs, which could be replaced by electronically controlled PMs, are placed behind the ground plane, therefore eliminating losses associated with bias lines generally used in pixelated antennas. The 70 movable element pixelated antenna is capable of reconfiguration in frequency, bandwidth, polarization, and beam steering. Herein, we demonstrate frequency and bandwidth reconfiguration.

Ground plane

Patch antenna

Reconfigurable antenna

Beam steering

Control reconfiguration

10.1002/mop.31905

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A Novel Bidirectional Z-Shaped Thermally Actuated RF MEMS Switch for Multiple-Beam Antenna Array

Advanced materials research (2013)

Jitendra Pal Yong Zhu Junwei Lu Dzung Viet Dao

In this paper RF MEMS switchis designed for dielectric-embedded electronically switched multiple-beam (DE-ESMB) antenna array. To achieve small stiffness without buckling, a novel bidirectional Z-shaped thermal actuator is used instead of V-shaped thermal actuator, which can generate large displacement and high contact force at low actuation voltage. With the actuation current from-0.6 A to 0.6 A, the electrothermal actuator can achieve a bidirectional motion in a dynamic range of-10.08 μm to 10.17 μm.RF performances are improved by suspending the structure 25 μm from the substrate using MetalMumps process. An ON state insertion loss of-0.14 dB at 10 GHz and an OFF state isolation of-67 dB at 10 GHz are achieved on low resistivity silicon substrate.

10.4028/www.scientific.net/amr.705.264

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A Novel Three-State Contactless RF Micromachined Switch for Wireless Applications

IEEE Electron Device Letters (2015)

Jitendra Pal Yong Zhu Junwei Lu Fahimullah Khan Dzung Viet Dao

This letter presents a novel three-state contactless radio frequency (RF) microelectromechanical systems switch for wireless applications. The switch is free from stiction and charge injection issues occurred inherently in contact-type RF MEMS switches, thereby increasing reliability and lifetime. The contactless switch is based on variable capacitance between signal lines and movable grounded electrodes controlled by electrostatic actuator. The movable grounded electrode has the capability to move bidirectionally, and therefore, the switch can change among ON-, OFF-, and deep OFF-states. Thus, additional isolation can be achieved in the deep OFF-state. The RF measurement results show that the contactless switch has a capacitance tuning ratio of 5.25 between OFF- and ON-states, and a higher tuning ratio of 11.18 between deep OFF- and ON-states. In addition, the switch exhibits -3.62 dB insertion loss and -24.43 dB isolation at 2.4 GHz. At 5 GHz, the insertion loss and isolation are -2.95 dB and -20.65 dB, respectively.

RF switch

Stiction

10.1109/led.2015.2487510

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Citations (12)

Erratum: Zhu, Y.; Pal, J. Low-Voltage and High-Reliability RF MEMS Switch with Combined Electrothermal and Electrostatic Actuation. Micromachines 2021, 12, 1237

Micromachines (2021)

Yong Zhu Jitendra Pal

The authors would like to update the Figure 3 and Figure 7 to the published paper [...].

10.3390/mi12111389

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Citations (3)