W. Mokwa

RWTH Aachen University

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Uwe Schnakenberg

RWTH Aachen University

Peter Walter

RWTH Aachen University

Yiannos Manoli

University of Freiburg

Florian Waschkowski

RWTH Aachen University

Michael Görtz

Fraunhofer Institute for Microelectronic Circuits and Systems

D. Köhl

TU Wien

Hoc Khiem Trieu

Hamburg University of Technology

G. Heiland

FH Aachen

Sandra Johnen

RWTH Aachen University

Thomas Schmitz‐Rode

RWTH Aachen University

Cooperative Institutions

RWTH Aachen University

146

Fraunhofer Institute for Microelectronic Circuits and Systems

Fraunhofer Society

FH Aachen

Universitätsklinikum Aachen

Forschungszentrum Jülich

University of Duisburg-Essen

Ophthalmology Associates (United States)

Westfälische Hochschule

Friedrich-Alexander-Universität Erlangen-Nürnberg

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Ongoing Development and First Long-Term Trials of a Cardiac Output Monitoring System in the Pulmonary Artery (Compass)

Biomedical Engineering / Biomedizinische Technik (2013)

Michael Pfennig Nina J. Cleven Sara Biela A. Urbaszek A. van Ooyen

Compass

10.1515/bmt-2013-4220

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Citations (0)

A new microstructured silicon substrate for ultrathin gas-sensitive films

Sensors and Actuators A Physical (1993)

Andreas Schütze U. Weber J. Zacheja D. Köhl W. Mokwa

Contact resistance

10.1016/0924-4247(93)80127-3

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Citations (17)

Development of a Post-CMOS Compatible Nanoporous Thin Film layer Based on Al₂O₃

IOP Conference Series Materials Science and Engineering (2018)

Oğuz Doǧan Armin Buschhausen Christian Walk W. Mokwa H. Vogt

Porous alumina is a popular material with numerous application fields. A post-CMOS compatible process chain for the fabrication of nanoporous surface based on Al2O3 by atomic layer deposition (ALD) is presented. By alternately applying small numbers of ALD cycles for Al2O3 and ZnO, a homogenous composite was accomplished, for which the principle of island growth of ALD materials at few deposition cycle numbers was utilised. By selective texture-etching of ZnO content via hydrofluoric acid (HF) in vaporous phase at 40 °C and 10.67 mbar, a porous surface of the etch resistant Al2O3 could be achieved. TOF-SIMS investigations verified the composition of ALD composite, whereas AFM and high resolution SEM images characterised the topographies of pre- and post-etched samples. Pores with opening diameters of up to 15 nm could be detected on the surface after vaporous HF treatment for 2 minutes. The amount of pores increased after an etching time of 5 minutes.

Hydrofluoric acid

Nanoporous

Deposition

10.1088/1757-899x/350/1/012001

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Citations (1)

Feasibility of implantation procedures of large multielectrode arrays for epiretinal stimulation

Anne Christine Rieck Thomas Laube Peter Walter Florian Waschkowski Gernot Rößler

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Thinned capacitive pressure sensors in flexible and stretchable extra soft substrates for tactile sensing; Studies on output signal bending dependence

Roland A. Fischer L. Weichsel W. Mokwa Michael Görtz

SIGNAL (programming language)

Tactile sensor

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Design, development and evaluation of a high spatial density CMOS chip for bidirectional communication with electrogenic cells

Ugur Yegin W. Mokwa

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Production processes and applications for the passive alignment of microcomponents

Microsystem Technologies (2006)

Christian Brecher Sven Lange Christian Peschke Martin Weinzierl G. Spanier

Groove (engineering)

Precision engineering

10.1007/s00542-006-0094-2

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Citations (1)

Retinal recordings with penetrating multielectrode arrays

V. Rincon Frank Müller Stefan Lück Jana Gehlen Andreas Offenhäeusser

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Single chip CMOS image sensors for a retina implant system

M. Schwarz R. Hauschild B.J. Hosticka J. Huppertz T. Kneip

This work describes the architecture and realization of microelectronic components for a retina implant system that will provide visual sensations to patients with photoreceptor degeneration by applying electrostimulation of the intact retinal ganglion cell layer. Special circuitry has been developed for a fast single-chip CMOS image sensor system which provides high dynamic range of more than seven decades (without a mechanical shutter) corresponding to the performance of the human eye. This image sensor system is directly attachable to a digital filter and a signal processor that compute the so-called receptive-field function for generation of the stimulation data. These external components are wireless linked to an implanted flexible silicon multielectrode stimulator which generates electrical signals for electrostimulation of the intact ganglion cells. All components, including additional hardware for digital signal processing and wireless data and power transmission have been developed for fabrication using our in-house standard CMOS-technology.

SIGNAL (programming language)

10.1109/iscas.1998.705445

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Citations (7)

Development of very large electrode arrays for epiretinal stimulation (VLARS)

BioMedical Engineering OnLine (2014)

Florian Waschkowski Stephan Hesse Anne Christine Rieck Tibor Lohmann Claudia Brockmann

Abstract Background Retinal implants have been developed to treat blindness causing retinal degenerations such as Retinitis pigmentosa (RP). The retinal stimulators are covering only a small portion of the retina usually in its center. To restore not only central vision but also a useful visual field retinal stimulators need to cover a larger area of the retina. However, large area retinal stimulators are much more difficult to implant into an eye. Some basic questions concerning this challenge should be answered in a series of experiments. Methods Large area retinal stimulators were fabricated as flexible multielectrode arrays (MEAs) using silicon technology with polyimide as the basic material for the substrate. Electrodes were made of gold covered with reactively sputtered iridium oxide. Several prototype designs were considered and implanted into enucleated porcine eyes. The prototype MEAs were also used as recording devices. Results Large area retinal stimulator MEAs were fabricated with a diameter of 12 mm covering a visual angle of 37.6° in a normal sighted human eye. The structures were flexible enough to be implanted in a folded state through an insertion nozzle. The implants could be positioned onto the retinal surface and fixated here using a retinal tack. Recording of spontaneous activity of retinal neurons was possible in vitro using these devices. Conclusions Large flexible MEAs covering a wider area of the retina as current devices could be fabricated using silicon technology with polyimide as a base material. Principal surgical techniques were established to insert such large devices into an eye and the devices could also be used for recording of retinal neural activity.

Retinal implant

10.1186/1475-925x-13-11

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Citations (41)