J. Yasaitis

Analog Devices (United States)

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Roger T. Howe

Stanford University

Lionel C. Kimerling

Massachusetts Institute of Technology

Jürgen Michel

Massachusetts Institute of Technology

G. Dawe

ON Semiconductor (United States)

Samerkhae Jongthammanurak

Thailand National Metal and Materials Technology Center

T. Tewksbury

Analog Devices (United States)

David T. Danielson

Shell (United Kingdom)

D.D. Cannon

Massachusetts Institute of Technology

Wojciech Giziewicz

OSRAM (Germany)

K. O

Physico-Technical Institute

Cooperative Institutions

Massachusetts Institute of Technology

Analog Devices (United States)

IIT@MIT

University of California, Berkeley

IBM (United States)

Stanford University

IBM Research - Thomas J. Watson Research Center

Cornell University

University of Florida

Karlsruhe Institute of Technology

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Micromachining and microfabrication process technology VII : 22-24 October 2001, San Francisco, USA

SPIE eBooks (1995)

Jean Michel Karam J. Yasaitis Semiconductor Equipment

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Asymmetric GRIN Lensed Single Mode Fiber-to-Waveguide Coupler

V. Nguyen Ruochen Sun D. K. Sparacin Trisha M. Montalbo Christina Manolatou

0.6 dB coupling loss was observed for a lensed, asymmetric graded-index mode converter. The mode converter is used to couple light at 1550 nm from a single mode optical fiber to an on-chip waveguide with n=1.7

Coupling loss

Waveguide

Mode (computer interface)

10.1109/group4.2006.1708189

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Modal Coupling in Micromechanical Vibratory Rate Gyroscopes

IEEE Sensors Journal (2006)

A. Srikantha Phani Ashwin A. Seshia Moorthi Palaniapan Roger T. Howe J. Yasaitis

The authors present modeling approaches to describe the coupling of modes in a resonant vibratory rate gyroscope. Modal coupling due to off-diagonal stiffness and damping terms is considered. Three analytical modeling approaches are presented in the context of a $z$ -axis micromechanical vibratory rate gyroscope fabricated in an integrated polysilicon surface-micromachining process. The first approach is based on frequency-response analysis of the gyroscope output. The second approach takes the route of state-space-based system identification to identify the modal-coupling parameters. A third approach based on measured vibration data identifies the coupling parameters due to stiffness and damping. These three methods are then applied to predict the extent of displacement and force coupling between the drive and the sense axes of an existing device as a function of varying degrees of matching between the resonant frequencies associated with the drive and the sense modes. Experimental data show that as the resonant frequencies of the drive and sense modes are brought closer together, an improvement in overall resolution and scale factor of the device is obtained at the expense of an enhanced coupling of forces to displacements between the two axes and the onset of instability for an open-loop sensing implementation.

10.1109/jsen.2006.881432

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Citations (50)

Microwave surface resistance of a superconducting Mo-Re alloy

IEEE Transactions on Magnetics (1975)

J. Yasaitis R. M. Rose

By using a Mo 0.75 Re 0.25 alloy endplate on a Nb microwave cavity (TE 011 mode, resonant at 11.2 GHZ), an upper bound for the residual surface resistance of this alloy was shown to be 2.8 µ-ohm, a lower bound for the breakdown field was shown to be 102 G. In view of the fact that these properties were determined at 11.2 GHZ on the first Mo-Re endplate made with no particular effort devoted to optimization of surface quality, this material is deserving of further consideration for practical microwave applications.

10.1109/tmag.1975.1058743

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Citations (9)

Micromachining and microfabrication process technology VI : 18-20 September 2000, Santa Clara, USA

SPIE eBooks (2000)

Jean-Michel Karam J. Yasaitis Semiconductor Equipment

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Silicon-based highly-efficient fiber-to-waveguide coupler for high index contrast systems

Applied Physics Letters (2006)

Victor Nguyen Trisha M. Montalbo Christina Manolatou Anu Agarwal Ching-yin Hong

A coupler to efficiently transfer broadband light from a single-mode optical fiber to a single-mode high-index contrast waveguide has been fabricated on a silicon substrate. We utilized a novel coupling scheme, with a vertically asymmetric design consisting of a stepwise parabolic graded index profile combined with a horizontal taper, to simultaneously confine light in both directions. Coupling efficiency has been measured as a function of the device dimensions. The optimal coupling efficiency is achieved for structures whose length equals the focal distance of the graded index and whose input width is close to the mode field diameter of the fiber. The fabricated structure is compact, robust and highly efficient, with an insertion loss of 2.2dB at 1550nm. The coupler exhibits less than 1dB variation in coupling efficiency in the measured spectral range from 1520nmto1620nm. The lowest insertion loss of 1.9dB is measured at 1540nm. The coupler design offers highly efficient coupling for single mode waveguides of core indices up to 2.2.

Waveguide

Coupling loss

10.1063/1.2179129

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Citations (42)

A 20GHz tensile strained Ge photodetector on Si platform with broad detection spectrum for optical communications and on-chip applications

Jifeng Liu Jürgen Michel Wojciech Giziewicz D.D. Cannon Samerkhae Jongthammanurak

This paper presents a 20 GHz Ge photodetector on Si platform that covers a broad detection spectrum from 850-1600 nm. This device has promising applications in high capacity optical communications and on-chip Si optoelectronic circuits.

10.1109/leos.2004.1363155

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Integrated surface-micromachined z-axis frame microgyroscope

Moorthi Palaniapan Roger T. Howe J. Yasaitis

We report the first integrated surface-micro machined z-axis frame microgyroscope fabricated in the Analog Devices Modular-MEMS process using 6 /spl mu/m thick polysilicon as the structural material and 5 V 0.8 /spl mu/m CMOS process. This vibratory microgyroscope, which operates in vacuum, measures the z-axis rotation rate by sensing the induced Coriolis acceleration using capacitive sensing. The amplitude of drive motion was estimated to be 2 /spl mu/m. The frame gyroscope mechanically decouples the drive and sense motion for stable operation. Integration of circuits and mechanical structures on the same substrate allowed signal sensing with low parasitics. The surface micromachined integrated z-axis frame gyroscope fabricated at Analog Devices has a measured noise floor of 0.05 deg/s//spl radic/Hz and a scale factor of 0.33 mV/deg/sec at 70 mtorr ambient pressure.

Bulk micromachining

SIGNAL (programming language)

Proof mass

Reciprocating motion

10.1109/iedm.2002.1175813

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Citations (9)

ΣΔ capacitive interface for a vertically-driven XaY-axis rate gyroscope

European Solid-State Circuits Conference (2002)

Xuesong Jiang Sunil A. Bhave J.I. Seeger Roger T. Howe Bernhard E. Boser

This paper presents the capacitive sensing interface for a vertically-driven X&Y-Axis rate gyroscope fabricated in a monolithic MEMS/circuits technology with 0.8µm CMOS and 6µm thick structural polysilicon. The Coriolis-acceleration transducer and the capacitive sensing interface form a continuous-time 2nd-order 1-bit ΣΔ modulator. The gyroscope achieves 8.6°/sec/√Hz noise floor at atmospheric pressure.

Interface (matter)

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Ion implantation of neon in silicon for planar amorphous isolation

Electronics Letters (1978)

J. Yasaitis

A new planar isolation technique for silicon integrated circuits is presented. The process uses neon implantation to create high-resistivity regions of amorphous silicon between active devices on a common substrate. Excellent surface planarity is obtained, and no high-temperature processing ii required. Results on test devices and an amorphous isolated m.n.o.s. capacitor memory are described.

Planarity testing

10.1049/el:19780310

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Citations (4)