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Philippe Helin

Katholieke Universiteit Leuven

21

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546

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Multi-Frequency Imaging with a CMOS Compatible Scandium Doped Aluminum Nitride PMUT Array

2021 MEMS | International Conference on Micro Electro Mechanical Systems
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Silicon nitride photonic platform for sensing applications

2019 OMN | International Conference on Optical MEMS and Nanophotonics
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Modal analysis based equivalent circuit model and its verification for a single cMUT cell

2017 Journal of Micromechanics and Microengineering
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Silicon photonics: Silicon nitride versus silicon-on-insulator

2016 OFC | Optical Fiber Communication Conference
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Challenges of monolithic integration for SiGe MEMS technology

2016 SENSORS | IEEE Sensors
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Si and SiN biophotonic technology platform, applied to biosensing, spectroscopy, and lens-free imaging

2015
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Transmit and Receive of a cMUT Cell: Modeling and Experiments

2014 Nanotechnology
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Development of a CMOS Compatible Biophotonics Platform Based on SiN Nanophotonic Waveguides

2014 CLEO | Conference on Lasers and Electro-Optics
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CMOS-integrated MEMS and photonic sensors for application in pico-satellites

2014
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Multi-sensors module in SiGeMEMS technology

2013
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