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Mamoru Hisamitsu
Mamoru Hisamitsu
Optics
Physics
Surface roughness
Substrate (chemistry)
Ellipsometry
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Observation of Ellipsometric Oscillations when Depositing SiOx Film on Si(100) Substrate Using an Electron Beam Deposition Method
1997
Japanese Journal of Applied Physics
Yoshifumi Yoshioka
Toyoyuki Hashimoto
Mamoru Hisamitsu
Fumihiko Ohtani
Tamio Yoshida
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