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M. Arneen
M. Arneen
Dimer
Sheet resistance
Ion implantation
Doping
CMOS
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Low energy implant throughput improvement by using the Arsenic dimer ion (As 2 + ) on the Axcelis GSDIII/LED ion implanter
2002
Peter Miltiadis Kopalidis
C. Sohl
Brian S. Freer
M. Arneen
R. Reece
M. Rathmell
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