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ChangYong Zhang
ChangYong Zhang
Sichuan University
Thin film
Sputtering
Scanning electron microscope
Sputter deposition
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Study in the porosity of the TiO 2 films prepared by magnetron sputtering deposition
2010
INEC | IEEE International Nanoelectronics Conference
Ding Ren
Yu Zou
ChangYong Zhang
Ningkang Huang
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