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Steve Ji
Steve Ji
Materials science
Phosphorus
Dram
phosphorus diffusion
Analytical chemistry
3
Papers
1
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0
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11:00 S1-2 Epi Process Margin Improvement Using Co-implantation to Control 13 Phosphorus Diffusion in a DRAM Manufacturing
2011
International Workshop on Junction Technology
S. Takagi
Michael Hsiao
Steve Ji
Yiliang Lin
Jay Huang
Y. Yu
Raymond Hung
Baonian Guo
W. Zou
L. Chiou
S Wei
H. L. Sun
A. Hsu
T. Toh
Kyu-Ha Shim
B. Colombeau
T. Henry
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Epi process margin improvement using co-implantation to control Phosphorus diffusion in a DRAM manufacturing
2011
IWJT | International Workshop on Junction Technology
Michael Hsiao
Steve Ji
Yiliang Lin
Jay Huang
Chien-Hua Chu
Pin-Yuan Yu
Wei-Ming Wang
Mei-ju Chen
Li Yuan-cheng
Chi-Ren Hung
Yu-Shan Chen
Baonian Guo
W. Zou
Lester Chiou
Scott Wei
H. L. Sun
Alex Hsu
T. Toh
Kyu-Ha Shim
B. Colombeau
Todd Henry
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