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K. Nishitani

Tohoku University

Thin film
Crystallization
Crystallography
Annealing (metallurgy)
Molecular dynamics

2

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Development of Experiment Integrated Computational Chemistry and Its Application to Advanced Materials

2009 The Japan Society of Applied Physics
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Prediction of Crystallization Temperature for HfO 2 Thin Film in High Temperature Annealing Process by Reaction Time Accelerating Molecular Dynamics

2009 The Japan Society of Applied Physics
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