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Satoshi Aikyo

Kanagawa Institute of Technology

5

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Influence of Wall Heating on CF2 Radical in CF4 Plasma

2002
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Influence of wall heating on CF2 radical in CF4 hollow cathode discharge plasma

2000 Czechoslovak Journal of Physics
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Effects of Fluorocarbon Films on CF Radical in CF4/H2 Plasma

1999 Japanese Journal of Applied Physics
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Citations (16)