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Rami Fathy
Rami Fathy
IBM
Simulation
Compromise
Optical proximity correction
Experimental data
Photolithography
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The effect of OPC optical and resist model parameters on the model accuracy, run time, and stability
2006
Amr Abdo
Rami Fathy
Ahmed Seoud
James M. Oberschmidt
Scott M. Mansfield
Mohamed Talbi
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Citations (6)
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